Browse the latest SEC filings and forms submitted by AXCELIS TECHNOLOGIES INC (ACLS). Access annual reports, quarterly statements, and other official disclosures.
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Search Company Filings →| Form | Filing Date | Description | Link |
|---|---|---|---|
| 4 | March 26, 2026 | - | View Document |
| SCHEDULE 13G/A | March 26, 2026 | - | View Document |
| 3 | March 25, 2026 | - | View Document |
| 144 | March 24, 2026 | - | View Document |
| 3 | March 24, 2026 | - | View Document |
| 8-K | March 12, 2026 | FORM 8-K | View Document |
| 4 | March 3, 2026 | - | View Document |
| 4 | March 3, 2026 | - | View Document |
| 4 | March 3, 2026 | - | View Document |
| 4 | March 3, 2026 | - | View Document |
| 4 | March 3, 2026 | - | View Document |
| 4 | March 3, 2026 | - | View Document |
| 10-K | Feb. 26, 2026 | 10-K | View Document |
| 4 | Feb. 23, 2026 | - | View Document |
| 144 | Feb. 20, 2026 | - | View Document |
| 8-K | Feb. 17, 2026 | FORM 8-K | View Document |
| SCHEDULE 13G | Feb. 12, 2026 | - | View Document |
| 425 | Feb. 12, 2026 | 425 | View Document |
| 425 | Feb. 6, 2026 | 425 | View Document |
| 8-K | Feb. 6, 2026 | FORM 8-K | View Document |
| 425 | Feb. 2, 2026 | 425 | View Document |
| 8-K | Feb. 2, 2026 | FORM 8-K | View Document |
| 425 | Jan. 28, 2026 | 425 | View Document |
| 8-K | Jan. 28, 2026 | FORM 8-K | View Document |
| 4 | Jan. 16, 2026 | - | View Document |
| EFFECT | Dec. 31, 2025 | - | View Document |
| 424B3 | Dec. 31, 2025 | 424B3 | View Document |
| S-4/A | Dec. 29, 2025 | S-4/A | View Document |
| 3 | Dec. 22, 2025 | - | View Document |
| 4 | Dec. 18, 2025 | - | View Document |
| 4 | Dec. 18, 2025 | - | View Document |
| 144 | Dec. 17, 2025 | - | View Document |
| 4 | Dec. 12, 2025 | - | View Document |
| 144 | Dec. 11, 2025 | - | View Document |
| S-4 | Dec. 8, 2025 | S-4 | View Document |
| SCHEDULE 13G/A | Nov. 14, 2025 | - | View Document |
| 10-Q | Nov. 6, 2025 | 10-Q | View Document |
| 8-K | Nov. 4, 2025 | FORM 8-K | View Document |
| 4 | Oct. 17, 2025 | - | View Document |
| 425 | Oct. 1, 2025 | 425 | View Document |
| 8-K | Oct. 1, 2025 | FORM 8-K | View Document |
| 8-K | Oct. 1, 2025 | FORM 8-K | View Document |
| 425 | Oct. 1, 2025 | 425 | View Document |
| 4 | Sept. 17, 2025 | - | View Document |
| 4 | Sept. 17, 2025 | - | View Document |
| SCHEDULE 13G | Aug. 14, 2025 | - | View Document |
| 8-K | Aug. 5, 2025 | FORM 8-K | View Document |
| 10-Q | Aug. 5, 2025 | 10-Q | View Document |
| 4 | June 17, 2025 | - | View Document |
| 4 | June 17, 2025 | - | View Document |
| S-8 | May 29, 2025 | FORM S-8 | View Document |
| 4 | May 21, 2025 | - | View Document |
| 144 | May 20, 2025 | - | View Document |
| 4 | May 20, 2025 | - | View Document |
| 4 | May 20, 2025 | - | View Document |
| 4 | May 19, 2025 | - | View Document |
| 4 | May 19, 2025 | - | View Document |
| 4 | May 19, 2025 | - | View Document |
| 4 | May 19, 2025 | - | View Document |
| 4 | May 19, 2025 | - | View Document |
| 4 | May 15, 2025 | - | View Document |
| 4 | May 15, 2025 | - | View Document |
| 4 | May 15, 2025 | - | View Document |
| 4 | May 15, 2025 | - | View Document |
| 4 | May 15, 2025 | - | View Document |
| 4 | May 15, 2025 | - | View Document |
| 4 | May 15, 2025 | - | View Document |
| 4 | May 15, 2025 | - | View Document |
| 8-K | May 8, 2025 | FORM 8-K | View Document |
| 8-K | May 6, 2025 | FORM 8-K | View Document |
| 10-Q | May 6, 2025 | 10-Q | View Document |
| SD | May 6, 2025 | FORM SD | View Document |
| 4 | April 22, 2025 | - | View Document |
| 8-K | April 21, 2025 | FORM 8-K | View Document |
| DEF 14A | March 31, 2025 | DEF 14A | View Document |
| ARS | March 31, 2025 | ARS | View Document |
| 8-K | March 12, 2025 | FORM 8-K | View Document |
| 4 | March 4, 2025 | - | View Document |
| 4 | March 4, 2025 | - | View Document |
| 4 | March 4, 2025 | - | View Document |
| 4 | March 4, 2025 | - | View Document |
| 4 | March 4, 2025 | - | View Document |
| 10-K | Feb. 28, 2025 | 10-K | View Document |
| 8-K | Feb. 10, 2025 | FORM 8-K | View Document |
| SCHEDULE 13G/A | Jan. 30, 2025 | - | View Document |
| 8-K | Jan. 10, 2025 | FORM 8-K | View Document |
| 4 | Jan. 7, 2025 | - | View Document |
| 4 | Dec. 16, 2024 | - | View Document |
| 3 | Dec. 12, 2024 | - | View Document |
| 4/A | Nov. 19, 2024 | - | View Document |
| SC 13G/A | Nov. 8, 2024 | - | View Document |
| 10-Q | Nov. 7, 2024 | 10-Q | View Document |
| 8-K | Nov. 6, 2024 | FORM 8-K | View Document |
| SC 13G/A | Oct. 18, 2024 | - | View Document |
| 4/A | Oct. 17, 2024 | - | View Document |
| 4 | Oct. 17, 2024 | - | View Document |
| 4 | Sept. 17, 2024 | - | View Document |
| 4 | Sept. 17, 2024 | - | View Document |
| 144 | Aug. 29, 2024 | - | View Document |
| 4 | Aug. 6, 2024 | - | View Document |
| 144 | Aug. 6, 2024 | - | View Document |
| 10-Q | Aug. 1, 2024 | 10-Q | View Document |
| 8-K | July 31, 2024 | FORM 8K | View Document |
| 8-K | July 9, 2024 | FORM 8-K | View Document |
| 4 | June 24, 2024 | - | View Document |
| 4 | June 18, 2024 | - | View Document |
| 4 | June 18, 2024 | - | View Document |
| 4 | June 5, 2024 | - | View Document |
| 4 | June 5, 2024 | - | View Document |
| 144 | May 30, 2024 | - | View Document |
| 4 | May 20, 2024 | - | View Document |
| 4 | May 20, 2024 | - | View Document |
| 144 | May 20, 2024 | - | View Document |
| 4 | May 20, 2024 | - | View Document |
| 4 | May 20, 2024 | - | View Document |
| 4 | May 17, 2024 | - | View Document |
| 4 | May 17, 2024 | - | View Document |
| 4 | May 17, 2024 | - | View Document |
| 4 | May 17, 2024 | - | View Document |
| SD | May 17, 2024 | FORM SD | View Document |
| 4/A | May 16, 2024 | - | View Document |
| 4 | May 16, 2024 | - | View Document |
| 4/A | May 16, 2024 | - | View Document |
| 4/A | May 16, 2024 | - | View Document |
| 4/A | May 16, 2024 | - | View Document |
| 4/A | May 16, 2024 | - | View Document |
| 4/A | May 16, 2024 | - | View Document |
| 4/A | May 16, 2024 | - | View Document |
| 4/A | May 16, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 15, 2024 | - | View Document |
| 4 | May 13, 2024 | - | View Document |
| 8-K | May 9, 2024 | FORM 8-K | View Document |
| 10-Q | May 2, 2024 | 10-Q | View Document |
| 8-K | May 1, 2024 | FORM 8-K | View Document |
| 4 | April 19, 2024 | - | View Document |
| DEF 14A | March 29, 2024 | FORM DEF 14A | View Document |
| ARS | March 29, 2024 | ARS | View Document |
| 4 | March 15, 2024 | - | View Document |
| 4 | March 15, 2024 | - | View Document |
| 4 | March 11, 2024 | - | View Document |
| PRE 14A | March 8, 2024 | PRE 14A | View Document |
| 144 | March 7, 2024 | - | View Document |
| 4 | March 1, 2024 | - | View Document |
| 4 | March 1, 2024 | - | View Document |
| 4 | March 1, 2024 | - | View Document |
| 144 | March 1, 2024 | - | View Document |
| 4 | March 1, 2024 | - | View Document |
| 4 | March 1, 2024 | - | View Document |
| 8-K | Feb. 29, 2024 | FORM 8-K | View Document |
| 4 | Feb. 29, 2024 | - | View Document |
| 3 | Feb. 28, 2024 | - | View Document |
| 3 | Feb. 28, 2024 | - | View Document |
| 10-K/A | Feb. 28, 2024 | 10-K/A | View Document |
| 4 | Feb. 26, 2024 | - | View Document |
| 144 | Feb. 23, 2024 | - | View Document |
| 10-K | Feb. 23, 2024 | 10-K | View Document |
| SC 13G/A | Feb. 13, 2024 | SCHEDULE 13G/A | View Document |
| SC 13G/A | Feb. 9, 2024 | AXCELIS TECHNOLOGIES, INC. | View Document |
| 8-K | Feb. 7, 2024 | - | View Document |
| SC 13G/A | Jan. 19, 2024 | - | View Document |
| 4 | Jan. 2, 2024 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 15, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 14, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 13, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | Nov. 6, 2023 | - | View Document |
| 10-Q | Nov. 2, 2023 | 10-Q | View Document |
| 8-K | Nov. 1, 2023 | FORM 8-K | View Document |
| 4 | Oct. 16, 2023 | FORM 4 SUBMISSION | View Document |
| 3 | Sept. 29, 2023 | FORM 3 SUBMISSION | View Document |
| 4 | Sept. 18, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Sept. 15, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Sept. 14, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | Sept. 14, 2023 | - | View Document |
| 4/A | Sept. 8, 2023 | FORM 4/A SUBMISSION | View Document |
| 144 | Sept. 7, 2023 | - | View Document |
| 4 | Sept. 7, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Sept. 7, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Sept. 7, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | Sept. 7, 2023 | - | View Document |
| 144 | Sept. 7, 2023 | - | View Document |
| 8-K | Sept. 5, 2023 | FORM 8-K | View Document |
| 3 | Sept. 1, 2023 | FORM 3 SUBMISSION | View Document |
| 144 | Aug. 7, 2023 | - | View Document |
| 144 | Aug. 7, 2023 | - | View Document |
| 4 | Aug. 7, 2023 | FORM 4 SUBMISSION | View Document |
| S-3ASR | Aug. 3, 2023 | S-3ASR | View Document |
| 10-Q | Aug. 3, 2023 | 10-Q | View Document |
| 8-K | Aug. 2, 2023 | FORM 8-K | View Document |
| 4 | June 16, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | June 15, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | June 14, 2023 | FORM 4 SUBMISSION | View Document |
| 3 | June 12, 2023 | FORM 3 SUBMISSION | View Document |
| 4 | June 12, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | June 12, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | June 12, 2023 | - | View Document |
| 144 | June 12, 2023 | - | View Document |
| 4 | June 12, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | June 9, 2023 | - | View Document |
| 144 | June 8, 2023 | - | View Document |
| 4 | June 8, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | June 7, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | June 7, 2023 | - | View Document |
| 144 | June 7, 2023 | - | View Document |
| 4 | June 7, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | June 7, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | June 6, 2023 | FORM 4 SUBMISSION | View Document |
| 4/A | June 6, 2023 | FORM 4/A SUBMISSION | View Document |
| 4 | May 30, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | May 26, 2023 | - | View Document |
| 4 | May 25, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 25, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | May 25, 2023 | - | View Document |
| 144 | May 25, 2023 | - | View Document |
| 144 | May 25, 2023 | - | View Document |
| 144 | May 25, 2023 | - | View Document |
| 4 | May 25, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 25, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 25, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | May 22, 2023 | - | View Document |
| 144 | May 19, 2023 | - | View Document |
| 4 | May 19, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 19, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | May 18, 2023 | - | View Document |
| 4 | May 18, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | May 18, 2023 | - | View Document |
| 4 | May 18, 2023 | FORM 4 SUBMISSION | View Document |
| SD | May 18, 2023 | FORM SD | View Document |
| 4 | May 18, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | May 18, 2023 | - | View Document |
| 144 | May 18, 2023 | - | View Document |
| 144 | May 17, 2023 | - | View Document |
| 4 | May 16, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | May 16, 2023 | - | View Document |
| 144 | May 16, 2023 | - | View Document |
| 144 | May 16, 2023 | - | View Document |
| 144 | May 16, 2023 | - | View Document |
| 4 | May 16, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2023 | FORM 4 SUBMISSION | View Document |
| 8-K | May 12, 2023 | FORM 8-K | View Document |
| 144 | May 11, 2023 | - | View Document |
| 4 | May 11, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | May 11, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | May 11, 2023 | - | View Document |
| 4 | May 10, 2023 | FORM 4 SUBMISSION | View Document |
| 144 | May 10, 2023 | - | View Document |
| 144 | May 9, 2023 | - | View Document |
| 144 | May 9, 2023 | - | View Document |
| 4 | May 9, 2023 | FORM 4 SUBMISSION | View Document |
| 10-Q | May 5, 2023 | 10-Q | View Document |
| 8-K | May 3, 2023 | FORM 8-K | View Document |
| 8-K | April 18, 2023 | FORM 8-K | View Document |
| SC 13G/A | April 10, 2023 | SCHEDULE 13G/A | View Document |
| DEF 14A | March 31, 2023 | FORM DEF 14A | View Document |
| ARS | March 31, 2023 | ARS | View Document |
| 4 | March 1, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2023 | FORM 4 SUBMISSION | View Document |
| 10-K | Feb. 24, 2023 | 10-K | View Document |
| 4 | Feb. 14, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 13, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 13, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 13, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 13, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 13, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 13, 2023 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 13, 2023 | FORM 4 SUBMISSION | View Document |
| SC 13G/A | Feb. 10, 2023 | AXCELIS TECHNOLOGIES, INC. | View Document |
| SC 13G/A | Feb. 9, 2023 | SCHEDULE 13G/A | View Document |
| 8-K | Feb. 8, 2023 | FORM 8-K | View Document |
| SC 13G/A | Jan. 26, 2023 | - | View Document |
| SC 13G/A | Jan. 20, 2023 | - | View Document |
| 4 | Dec. 15, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 14, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 9, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 8, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 5, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 30, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 28, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 28, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 23, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 21, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 18, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 15, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 15, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 14, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 10, 2022 | FORM 4 SUBMISSION | View Document |
| 10-Q | Nov. 3, 2022 | 10-Q | View Document |
| 8-K | Nov. 2, 2022 | FORM 8-K | View Document |
| SC 13G | Oct. 27, 2022 | AXCELIS TECHNOLOGIES, INC. | View Document |
| SC 13G/A | Oct. 7, 2022 | PRIMECAP MANAGEMENT CO/CA/ | View Document |
| 4 | Sept. 15, 2022 | FORM 4 SUBMISSION | View Document |
| 3 | Sept. 6, 2022 | FORM 3 SUBMISSION | View Document |
| 4 | Aug. 25, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 15, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 12, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 12, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 12, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 12, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 8, 2022 | FORM 4 SUBMISSION | View Document |
| 10-Q | Aug. 4, 2022 | 10-Q | View Document |
| 8-K | Aug. 3, 2022 | FORM 8-K | View Document |
| SD | May 20, 2022 | SD | View Document |
| 4 | May 18, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | May 16, 2022 | FORM 4 SUBMISSION | View Document |
| 8-K | May 11, 2022 | FORM 8-K | View Document |
| 10-Q | May 5, 2022 | 10-Q | View Document |
| 8-K | May 4, 2022 | FORM 8-K | View Document |
| DEF 14A | March 30, 2022 | DEF 14A | View Document |
| 4 | March 17, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 16, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 15, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 15, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 3, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2022 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 28, 2022 | FORM 4 SUBMISSION | View Document |
| 10-K | Feb. 25, 2022 | 10-K | View Document |
| 8-K | Feb. 24, 2022 | FORM 8-K | View Document |
| 3 | Feb. 23, 2022 | FORM 3 SUBMISSION | View Document |
| 3 | Feb. 23, 2022 | FORM 3 SUBMISSION | View Document |
| SC 13G/A | Feb. 10, 2022 | PRIMECAP MANAGEMENT CO/CA/ | View Document |
| 4 | Feb. 10, 2022 | FORM 4 SUBMISSION | View Document |
| SC 13G/A | Feb. 9, 2022 | SCHEDULE 13G/A | View Document |
| SC 13G/A | Feb. 9, 2022 | AXCELIS TECHNOLOGIES, INC. | View Document |
| SC 13G/A | Feb. 8, 2022 | SEC SCHEDULE 13G | View Document |
| 8-K | Feb. 7, 2022 | FORM 8-K | View Document |
| SC 13G/A | Jan. 28, 2022 | - | View Document |
| 4 | Dec. 9, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 22, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 12, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 8, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 8, 2021 | FORM 4 SUBMISSION | View Document |
| 10-Q | Nov. 5, 2021 | 10-Q | View Document |
| 8-K | Nov. 3, 2021 | FORM 8-K | View Document |
| 4 | Sept. 15, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 31, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 30, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 30, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 27, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 27, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 27, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 25, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 16, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 9, 2021 | FORM 4 SUBMISSION | View Document |
| 10-Q | Aug. 6, 2021 | 10-Q | View Document |
| 8-K | Aug. 4, 2021 | FORM 8-K | View Document |
| 4 | May 24, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 21, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2021 | FORM 4 SUBMISSION | View Document |
| SD | May 18, 2021 | SD | View Document |
| 4 | May 18, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2021 | FORM 4 SUBMISSION | View Document |
| 8-K | May 13, 2021 | FORM 8-K | View Document |
| 10-Q | May 6, 2021 | 10-Q | View Document |
| 8-K | May 4, 2021 | FORM 8-K | View Document |
| DEF 14A | March 25, 2021 | DEF 14A | View Document |
| 4 | March 12, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | March 12, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | March 3, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2021 | FORM 4 SUBMISSION | View Document |
| 10-K | Feb. 26, 2021 | 10-K | View Document |
| 4 | Feb. 25, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 19, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 18, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 17, 2021 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 17, 2021 | FORM 4 SUBMISSION | View Document |
| SC 13G/A | Feb. 12, 2021 | SEC SCHEDULE 13G | View Document |
| SC 13G/A | Feb. 12, 2021 | AXCELIS TECHNOLOGIES, INC. | View Document |
| SC 13G/A | Feb. 12, 2021 | SC 13G/A | View Document |
| 8-K | Feb. 10, 2021 | FORM 8-K | View Document |
| SC 13G/A | Feb. 10, 2021 | SCHEDULE 13G/A | View Document |
| SC 13G/A | Feb. 4, 2021 | SEC SCHEDULE 13G | View Document |
| SC 13G/A | Jan. 26, 2021 | - | View Document |
| 4 | Dec. 1, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 24, 2020 | FORM 4 SUBMISSION | View Document |
| 4/A | Nov. 18, 2020 | FORM 4/A SUBMISSION | View Document |
| 4 | Nov. 17, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 17, 2020 | FORM 4 SUBMISSION | View Document |
| 10-Q | Nov. 6, 2020 | 10-Q | View Document |
| 8-K | Nov. 5, 2020 | FORM 8-K | View Document |
| 10-Q | Aug. 5, 2020 | 10-Q | View Document |
| 8-K | Aug. 4, 2020 | FORM 8-K | View Document |
| S-8 | May 29, 2020 | S-8 | View Document |
| 4 | May 29, 2020 | FORM 4 SUBMISSION | View Document |
| S-3ASR | May 29, 2020 | S-3ASR | View Document |
| 4/A | May 28, 2020 | FORM 4/A SUBMISSION | View Document |
| 4 | May 28, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 26, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 26, 2020 | FORM 4 SUBMISSION | View Document |
| SD | May 22, 2020 | SD | View Document |
| 4 | May 22, 2020 | FORM 4 SUBMISSION | View Document |
| 8-K/A | May 21, 2020 | 8-K/A | View Document |
| 8-K | May 21, 2020 | FORM 8-K | View Document |
| 4 | May 19, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 19, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 19, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 19, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 19, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 19, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 19, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 11, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 8, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | May 8, 2020 | FORM 4 SUBMISSION | View Document |
| 10-Q | May 6, 2020 | 10-Q | View Document |
| 8-K | May 5, 2020 | FROM 8-K | View Document |
| DEF 14A | March 30, 2020 | DEF 14A | View Document |
| 4 | March 4, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | March 3, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2020 | FORM 4 SUBMISSION | View Document |
| 10-K | March 2, 2020 | 10-K | View Document |
| 4 | March 2, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 20, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 13, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 13, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 12, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 12, 2020 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 12, 2020 | FORM 4 SUBMISSION | View Document |
| SC 13G/A | Feb. 12, 2020 | SC 13G/A | View Document |
| SC 13G/A | Feb. 12, 2020 | SCHEDULE 13G/A | View Document |
| SC 13G/A | Feb. 12, 2020 | SCHEDULE 13G/A | View Document |
| 4 | Feb. 10, 2020 | FORM 4 SUBMISSION | View Document |
| SC 13G/A | Feb. 7, 2020 | AXCELIS TECHNOLOGIES, INC. | View Document |
| 8-K | Feb. 5, 2020 | FORM 8-K | View Document |
| SC 13G/A | Feb. 4, 2020 | - | View Document |
| SC 13G/A | Jan. 27, 2020 | SEC SCHEDULE 13G | View Document |
| 4 | Dec. 13, 2019 | FORM 4 SUBMISSION | View Document |
| 4/A | Dec. 13, 2019 | FORM 4/A SUBMISSION | View Document |
| 4 | Dec. 12, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 11, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 10, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 9, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Dec. 5, 2019 | FORM 4 SUBMISSION | View Document |
| 8-K | Dec. 3, 2019 | FORM 8-K | View Document |
| 4 | Nov. 22, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 20, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 20, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 19, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 18, 2019 | FORM 4 SUBMISSION | View Document |
| 10-Q | Nov. 7, 2019 | 10-Q | View Document |
| 8-K | Oct. 31, 2019 | 8-K | View Document |
| 8-K | Sept. 24, 2019 | 8-K | View Document |
| 4 | Aug. 21, 2019 | FORM 4 SUBMISSION | View Document |
| 8-K | Aug. 15, 2019 | 8-K | View Document |
| 4 | Aug. 15, 2019 | FORM 4 SUBMISSION | View Document |
| 3 | Aug. 15, 2019 | FORM 3 SUBMISSION | View Document |
| 10-Q | Aug. 7, 2019 | 10-Q | View Document |
| 8-K | Aug. 6, 2019 | 8-K | View Document |
| 4/A | May 23, 2019 | FORM 4/A SUBMISSION | View Document |
| 4/A | May 23, 2019 | FORM 4/A SUBMISSION | View Document |
| 4/A | May 23, 2019 | FORM 4/A SUBMISSION | View Document |
| SD | May 22, 2019 | SD | View Document |
| S-8 | May 21, 2019 | S-8 | View Document |
| 4 | May 17, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2019 | FORM 4 SUBMISSION | View Document |
| 8-K | May 15, 2019 | 8-K | View Document |
| 10-Q | May 8, 2019 | 10-Q | View Document |
| 8-K | May 7, 2019 | 8-K | View Document |
| DEF 14A | March 27, 2019 | DEF 14A | View Document |
| 4 | March 13, 2019 | FORM 4 SUBMISSION | View Document |
| 10-K | March 11, 2019 | 10-K | View Document |
| 4 | March 1, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | March 1, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 20, 2019 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 15, 2019 | FORM 4 SUBMISSION | View Document |
| 4/A | Feb. 12, 2019 | FORM 4/A SUBMISSION | View Document |
| SC 13G/A | Feb. 12, 2019 | SEC SCHEDULE 13G | View Document |
| SC 13G/A | Feb. 11, 2019 | - | View Document |
| SC 13G/A | Feb. 8, 2019 | SC 13G/A | View Document |
| SC 13G/A | Feb. 8, 2019 | AXCELIS TECHNOLOGIES, INC. | View Document |
| SC 13G/A | Feb. 8, 2019 | SCHEDULE 13G/A | View Document |
| 8-K | Feb. 6, 2019 | 8-K | View Document |
| SC 13G/A | Jan. 24, 2019 | - | View Document |
| 4 | Nov. 21, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 16, 2018 | FORM 4 SUBMISSION | View Document |
| 10-Q | Nov. 2, 2018 | 10-Q | View Document |
| 8-K | Nov. 1, 2018 | 8-K | View Document |
| 10-Q | Aug. 3, 2018 | 10-Q | View Document |
| 8-K | Aug. 2, 2018 | 8-K | View Document |
| SC 13G/A | July 10, 2018 | SEC SCHEDULE 13G | View Document |
| 4 | June 1, 2018 | FORM 4 SUBMISSION | View Document |
| SD | May 24, 2018 | SD | View Document |
| 8-K | May 18, 2018 | 8-K | View Document |
| 4 | May 18, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2018 | FORM 4 SUBMISSION | View Document |
| 3 | May 16, 2018 | FORM 3 SUBMISSION | View Document |
| 10-Q | May 4, 2018 | 10-Q | View Document |
| 8-K | May 2, 2018 | 8-K | View Document |
| DEF 14A | March 27, 2018 | DEF 14A | View Document |
| 10-K | March 14, 2018 | 10-K | View Document |
| 4 | March 14, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | March 14, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2018 | FORM 4 SUBMISSION | View Document |
| 4 | March 2, 2018 | FORM 4 SUBMISSION | View Document |
| SC 13G | Feb. 13, 2018 | 2017 13-G FILING | View Document |
| SC 13G/A | Feb. 12, 2018 | - | View Document |
| SC 13G/A | Feb. 9, 2018 | SCHEDULE 13G/A | View Document |
| SC 13G | Feb. 8, 2018 | - | View Document |
| 8-K | Feb. 6, 2018 | 8-K | View Document |
| SC 13G/A | Jan. 23, 2018 | - | View Document |
| SC 13G | Jan. 10, 2018 | SEC SCHEDULE 13G | View Document |
| SC 13G/A | Jan. 4, 2018 | SC 13G/A | View Document |
| 4 | Nov. 16, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 15, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 15, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 15, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 9, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 9, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 9, 2017 | FORM 4 SUBMISSION | View Document |
| SC 13G/A | Nov. 9, 2017 | - | View Document |
| 4 | Nov. 9, 2017 | FORM 4 SUBMISSION | View Document |
| 10-Q | Nov. 3, 2017 | 10-Q | View Document |
| 8-K | Nov. 2, 2017 | 8-K | View Document |
| UPLOAD | Sept. 19, 2017 | - | View Document |
| 4 | Sept. 13, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Sept. 13, 2017 | FORM 4 SUBMISSION | View Document |
| CORRESP | Sept. 8, 2017 | - | View Document |
| UPLOAD | Sept. 6, 2017 | - | View Document |
| 4 | Aug. 24, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 15, 2017 | FORM 4 SUBMISSION | View Document |
| 10-Q | Aug. 4, 2017 | 10-Q | View Document |
| 8-K | Aug. 3, 2017 | 8-K | View Document |
| 4 | June 8, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | June 8, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | June 8, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 31, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 26, 2017 | FORM 4 SUBMISSION | View Document |
| S-8 | May 25, 2017 | S-8 | View Document |
| SD | May 24, 2017 | SD | View Document |
| 4 | May 18, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 8-K | May 17, 2017 | 8-K | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 15, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 11, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 11, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | May 11, 2017 | FORM 4 SUBMISSION | View Document |
| 10-Q | May 5, 2017 | 10-Q | View Document |
| 8-K | May 4, 2017 | 8-K | View Document |
| EFFECT | April 14, 2017 | - | View Document |
| UPLOAD | April 12, 2017 | - | View Document |
| CORRESP | April 12, 2017 | - | View Document |
| S-3 | April 7, 2017 | S-3 | View Document |
| DEF 14A | March 29, 2017 | DEF 14A | View Document |
| 10-K | March 14, 2017 | 10-K | View Document |
| 8-K | Feb. 21, 2017 | 8-K | View Document |
| 4 | Feb. 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 17, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 15, 2017 | FORM 4 SUBMISSION | View Document |
| SC 13G/A | Feb. 13, 2017 | AXCELIS TECHNOLOGIES, INC. | View Document |
| 4 | Feb. 9, 2017 | FORM 4 SUBMISSION | View Document |
| SC 13G | Feb. 9, 2017 | SCHEDULE 13G | View Document |
| SC 13G/A | Feb. 9, 2017 | SC 13G/A | View Document |
| SC 13G | Feb. 9, 2017 | 13-G FILING | View Document |
| 4 | Feb. 8, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 8, 2017 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 8, 2017 | FORM 4 SUBMISSION | View Document |
| 8-K | Feb. 1, 2017 | 8-K | View Document |
| 8-K | Jan. 25, 2017 | 8-K | View Document |
| SC 13G/A | Jan. 19, 2017 | - | View Document |
| 4 | Dec. 13, 2016 | FORM 4 SUBMISSION | View Document |
| SC 13G/A | Nov. 23, 2016 | 13G / A FILING | View Document |
| 4 | Nov. 16, 2016 | FORM 4 SUBMISSION | View Document |
| 3 | Nov. 15, 2016 | FORM 3 SUBMISSION | View Document |
| 10-Q | Nov. 3, 2016 | 10-Q | View Document |
| 8-K | Nov. 2, 2016 | 8-K | View Document |
| SC 13G/A | Sept. 30, 2016 | 13-G/A FILING | View Document |
| 4 | Aug. 10, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 8, 2016 | FORM 4 SUBMISSION | View Document |
| 10-Q | Aug. 8, 2016 | 10-Q | View Document |
| 8-K | Aug. 2, 2016 | 8-K | View Document |
| 8-K | July 5, 2016 | 8-K | View Document |
| SD | May 27, 2016 | SD | View Document |
| S-8 | May 27, 2016 | S-8 | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 17, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 9, 2016 | FORM 4 SUBMISSION | View Document |
| 4 | May 6, 2016 | FORM 4 SUBMISSION | View Document |
| 8-K | May 5, 2016 | 8-K | View Document |
| 10-Q | May 5, 2016 | 10-Q | View Document |
| 8-K | May 2, 2016 | 8-K | View Document |
| DEFA14A | April 12, 2016 | DEFA14A | View Document |
| 8-K | April 11, 2016 | 8-K | View Document |
| DEFA14A | April 11, 2016 | DEFA14A | View Document |
| DEFA14A | April 4, 2016 | DEFA14A | View Document |
| DEF 14A | March 14, 2016 | DEF 14A | View Document |
| 10-K | March 4, 2016 | 10-K | View Document |
| PRE 14A | Feb. 29, 2016 | PRE 14A | View Document |
| SC 13G/A | Feb. 12, 2016 | SENVEST MANAGEMENT, LLC | View Document |
| SC 13G/A | Feb. 12, 2016 | SC 13G/A | View Document |
| SC 13G | Feb. 10, 2016 | 2015 13-G FILING | View Document |
| 8-K | Feb. 2, 2016 | 8-K | View Document |
| SC 13G/A | Jan. 25, 2016 | - | View Document |
| 4 | Nov. 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 10, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 10, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | Nov. 10, 2015 | FORM 4 SUBMISSION | View Document |
| 10-Q | Nov. 5, 2015 | 10-Q | View Document |
| 8-K | Nov. 4, 2015 | 8-K | View Document |
| 4 | Aug. 17, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 12, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | Aug. 12, 2015 | FORM 4 SUBMISSION | View Document |
| 10-Q | Aug. 5, 2015 | 10-Q | View Document |
| 8-K | Aug. 4, 2015 | 8-K | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | July 16, 2015 | FORM 4 SUBMISSION | View Document |
| 4/A | July 16, 2015 | FORM 4/A SUBMISSION | View Document |
| SC 13G | June 30, 2015 | AXCELIS TECHNOLOGIES, INC. | View Document |
| S-8 | May 29, 2015 | S-8 | View Document |
| SD | May 22, 2015 | SD | View Document |
| SC 13D/A | May 20, 2015 | AMENDMENT NO. 4 TO THE SCHEDULE 13D | View Document |
| 4 | May 18, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | May 18, 2015 | FORM 4 SUBMISSION | View Document |
| SC 13D/A | May 15, 2015 | AMENDMENT NO. 3 TO THE SCHEDULE 13D | View Document |
| 4 | May 15, 2015 | FORM 4 SUBMISSION | View Document |
| 8-K | May 14, 2015 | 8-K | View Document |
| 3 | May 13, 2015 | FORM 3 SUBMISSION | View Document |
| 3 | May 13, 2015 | FORM 3 SUBMISSION | View Document |
| 3 | May 13, 2015 | FORM 3 SUBMISSION | View Document |
| 10-Q | May 6, 2015 | 10-Q | View Document |
| 8-K | May 5, 2015 | 8-K | View Document |
| ARS | March 25, 2015 | AUTO-GENERATED PAPER DOCUMENT | View Document |
| DEF 14A | March 25, 2015 | DEF 14A | View Document |
| 10-K/A | March 12, 2015 | 10-K/A | View Document |
| 10-K | March 11, 2015 | 10-K | View Document |
| SC 13D/A | March 6, 2015 | AMENDMENT NO. 2 TO THE SCHEDULE 13D | View Document |
| 8-K | March 6, 2015 | 8-K | View Document |
| DEFA14A | March 6, 2015 | 8-K | View Document |
| DFAN14A | March 3, 2015 | - | View Document |
| PRE 14A | March 3, 2015 | PRE 14A | View Document |
| 4 | Feb. 20, 2015 | FORM 4 SUBMISSION | View Document |
| 4 | Feb. 19, 2015 | BINTZ OPTION EXERCISE FEB 2015 | View Document |
| 4 | Feb. 19, 2015 | LAWSON FEB 2015 OPTION EXERCISE | View Document |
| SC 13G/A | Feb. 13, 2015 | SC 13G/A | View Document |
| DEFA14A | Feb. 13, 2015 | DEFA14A | View Document |
| SC 13D/A | Feb. 9, 2015 | AMENDMENT NO. 1 TO THE SCHEDULE 13D | View Document |
| 8-K | Feb. 5, 2015 | 8-K | View Document |
| SC 13G | Feb. 3, 2015 | DECEMBER 31, 2014 13-G FILING | View Document |
| SC 13G/A | Jan. 30, 2015 | - | View Document |
| 8-K | Jan. 12, 2015 | 8-K | View Document |
| 4 | Nov. 19, 2014 | LAWSON NOVEMBER 2014 SALE | View Document |
| 4 | Nov. 17, 2014 | GEORGE RSU GRANT NOV 2014 | View Document |
| 4 | Nov. 17, 2014 | LUNDBERG RSU GRANT NOV 2014 | View Document |
| 8-K | Nov. 14, 2014 | 8-K | View Document |
| 4 | Nov. 12, 2014 | FALLON NOV 2014 SALE | View Document |
| 10-Q | Nov. 6, 2014 | 10-Q | View Document |
| 8-K | Nov. 5, 2014 | 8-K | View Document |
| 8-K | Oct. 7, 2014 | 8-K | View Document |
| SC 13D | Sept. 16, 2014 | - | View Document |
| SC 13G/A | Sept. 4, 2014 | SC 13G/A | View Document |
| 8-K | Aug. 26, 2014 | 8-K | View Document |
| 8-K | Aug. 21, 2014 | 8-K | View Document |
| 10-Q | Aug. 8, 2014 | 10-Q | View Document |
| 8-K | Aug. 4, 2014 | 8-K | View Document |
| 4 | July 17, 2014 | BREWER 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | BINTZ 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | FALLON 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | PUMA 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | ALDEBORGH 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | LAWSON 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | THOMPSON 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | NETTLES 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | KEITHLEY 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | JENNINGS 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | HARDIS 2014 OPTION GRANT | View Document |
| 4 | July 17, 2014 | FLETCHER 2014OPTION GRANT | View Document |
| 4 | July 17, 2014 | GEORGE 2014 STOCK OPTION GRANT | View Document |
| 4 | July 17, 2014 | LUNDBERG 2014 STOCK OPTION GRANT | View Document |
| 4 | June 2, 2014 | GEORGE MKT PURCHASE (2) MAY 2014 | View Document |
| 4 | May 29, 2014 | A GEORGE MARKET PURCHASE MAY 2014 | View Document |
| SD | May 28, 2014 | SD | View Document |
| 4 | May 27, 2014 | FLETCHER MARKET PURCHASE MAY 2014 | View Document |
| S-8 | May 22, 2014 | S-8 | View Document |
| 4 | May 20, 2014 | - | View Document |
| 8-K | May 19, 2014 | 8-K | View Document |
| 3 | May 14, 2014 | - | View Document |
| 3 | May 14, 2014 | - | View Document |
| 4 | May 12, 2014 | LAWSON STOCK PURCHASE MAY 2014 | View Document |
| 4/A | May 12, 2014 | LAWSON STOCK PURCHASE MAY 2014 AMEND | View Document |
| 10-Q | May 8, 2014 | 10-Q | View Document |
| SC 13G | May 7, 2014 | SC 13G | View Document |
| 8-K | May 6, 2014 | 8-K | View Document |
| ARS | April 9, 2014 | AUTO-GENERATED PAPER DOCUMENT | View Document |
| DEF 14A | March 25, 2014 | DEF 14A | View Document |
| 4 | March 3, 2014 | KEITHLEY 2013 MARKET PURCHASE | View Document |
| 10-K | March 3, 2014 | 10-K | View Document |
| 4 | Feb. 18, 2014 | BINTZ SALE FEB 2014 | View Document |
| SC 13G | Feb. 7, 2014 | 13-G FILING | View Document |
| 8-K | Feb. 4, 2014 | 8-K | View Document |
| 4/A | Jan. 29, 2014 | PUMA RECORD ADJUSTMENT | View Document |
| 4/A | Jan. 29, 2014 | BINTZ RECORD ADJUSTMENT | View Document |
| 4/A | Jan. 29, 2014 | BREWER RECORD ADJUSTMENT | View Document |
| SC 13G/A | Jan. 28, 2014 | - | View Document |
| 4 | Dec. 17, 2013 | BINTZ RSU SALE TO COVER DEC 2013 | View Document |
| 4 | Dec. 17, 2013 | PUMA SALE TO COVER RSU VEST DEC 2013 | View Document |
| EFFECT | Dec. 4, 2013 | - | View Document |
| UPLOAD | Nov. 25, 2013 | - | View Document |
| S-3 | Nov. 25, 2013 | S-3 | View Document |
| CORRESP | Nov. 15, 2013 | - | View Document |
| 3 | Nov. 14, 2013 | LAWSON FORM 3 | View Document |
| 4 | Nov. 12, 2013 | FALLON NOV 2013 SALE | View Document |
| 10-Q | Nov. 8, 2013 | 10-Q | View Document |
| 8-K | Nov. 6, 2013 | 8-K | View Document |
| UPLOAD | Nov. 1, 2013 | - | View Document |
| 8-K | Sept. 17, 2013 | 8-K | View Document |
| 4 | Sept. 17, 2013 | BINTZ RSU SALE TO COVER SEPT 2013 | View Document |
| 4 | Sept. 17, 2013 | PUMA SALE TO COVER RSU VEST SEPT 2013 | View Document |
| 4 | Aug. 13, 2013 | THOMPSON AUGUST 2013 MARKET PURCHASE | View Document |
| 4 | Aug. 13, 2013 | HARDIS 2013 MARKET PURCHASE | View Document |
| 4 | Aug. 12, 2013 | FLETCHER AUG 2013 MARKET PURCHASE | View Document |
| 4 | Aug. 8, 2013 | JENNINGS AUG 2013 MARKET PURCHASE | View Document |
| 10-Q | Aug. 2, 2013 | 10-Q | View Document |
| 8-K | Aug. 2, 2013 | 8-K | View Document |
| 8-K | Aug. 1, 2013 | 8-K | View Document |
| 4 | July 16, 2013 | NETTLES 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | FALLON 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | BREWER 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | BINTZ 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | ALDEBORGH 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | PUMA 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | FLETCHER 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | HARDIS 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | JENNINGS 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | KEITHLEY 2013 OPTION GRANT | View Document |
| 4 | July 16, 2013 | THOMPSON 2013 OPTION GRANT | View Document |
| 8-K | July 9, 2013 | 8-K | View Document |
| 8-K | June 20, 2013 | 8-K | View Document |
| 4 | June 19, 2013 | RSU SALE TO COVER JUNE 2013 | View Document |
| 4 | June 19, 2013 | PUMA SALE TO COVER RSU VEST JUNE 2013 | View Document |
| S-8 | May 31, 2013 | S-8 | View Document |
| S-8 POS | May 31, 2013 | S-8 POS | View Document |
| 8-K | May 16, 2013 | 8-K | View Document |
| 10-Q | May 6, 2013 | 10-Q | View Document |
| DEFA14A | May 6, 2013 | DEFA14A | View Document |
| 8-K | May 6, 2013 | 8-K | View Document |
| 8-K | May 2, 2013 | 8-K | View Document |
| ARS | April 4, 2013 | AUTO-GENERATED PAPER DOCUMENT | View Document |
| DEF 14A | March 26, 2013 | DEF 14A | View Document |
| 4 | March 19, 2013 | PUMA SALE TO COVER RSU VEST MARCH 2013 | View Document |
| 4 | March 19, 2013 | RSU SALE TO COVER MARCH 2013 | View Document |
| 10-K | March 1, 2013 | 10-K | View Document |
| 4 | Feb. 13, 2013 | BREWER SALE FEB 2013 | View Document |
| SC 13G | Feb. 13, 2013 | 13-G FILING AS OF DECEMBER 31, 2012 | View Document |
| 3 | Feb. 13, 2013 | ALDEBORGH FORM 3 | View Document |
| SC 13G/A | Feb. 8, 2013 | - | View Document |
| 8-K | Feb. 4, 2013 | 8-K | View Document |
| 4 | Jan. 22, 2013 | ZAGER RSU VEST JAN 2013 | View Document |
| 4 | Jan. 16, 2013 | BINTZ BASE PAY RSU 2013 | View Document |
| 4 | Jan. 16, 2013 | PUMA BASE PAY RSU GRANT 2013 | View Document |
| 8-K | Dec. 18, 2012 | 8-K | View Document |
| 8-K | Dec. 4, 2012 | 8-K | View Document |
| 8-K | Nov. 30, 2012 | 8-K | View Document |
| 10-Q | Nov. 5, 2012 | 10-Q | View Document |
| 8-K | Nov. 1, 2012 | 8-K | View Document |
| 8-K | Sept. 13, 2012 | 8-K | View Document |
| 8-K | Sept. 7, 2012 | 8-K | View Document |
| 10-Q | Aug. 7, 2012 | 10-Q | View Document |
| 8-K | Aug. 2, 2012 | 8-K | View Document |
| 4 | July 17, 2012 | FLETCHER 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | PUMA 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | ZAGER 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | FALLON 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | BREWER 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | BINTZ 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | HARDIS 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | JENNINGS 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | KEITHLEY 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | NETTLES 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | THOMPSON 2012 OPTION GRANT | View Document |
| 4 | July 17, 2012 | BRAUN 2012 OPTION GRANT | View Document |
| S-8 | May 30, 2012 | S-8 | View Document |
| 8-K | May 29, 2012 | 8-K | View Document |
| 4/A | May 29, 2012 | THOMPSON PURCHASE AMEND MAY 2012 | View Document |
| 4 | May 29, 2012 | FLETCHER PURCHASE MAY 2012 | View Document |
| 4 | May 29, 2012 | JENNINGS PURCHASE MAY 2012 | View Document |
| 4 | May 25, 2012 | THOMPSON PURCHASE MAY 2012 | View Document |
| 4 | May 25, 2012 | FALLON PURCHASE MAY 24 2012 | View Document |
| 4 | May 24, 2012 | BINTZ PURCHASE MAY 2012 | View Document |
| 4 | May 24, 2012 | PURCHASE MAY 2012 | View Document |
| 4 | May 23, 2012 | - | View Document |
| 4 | May 23, 2012 | PUMA MAY 23 2012 PURCHASE | View Document |
| 10-Q | May 4, 2012 | 10-Q | View Document |
| 8-K | May 3, 2012 | 8-K | View Document |
| DEFA14A | April 17, 2012 | DEFA14A | View Document |
| 8-K | April 17, 2012 | 8-K | View Document |
| ARS | March 26, 2012 | AUTO-GENERATED PAPER DOCUMENT | View Document |
| DEF 14A | March 23, 2012 | DEF 14A | View Document |
| 4 | March 16, 2012 | BREWER 2012 RSU GRANT | View Document |
| 4 | March 16, 2012 | FALLON 2012 RSU GRANT | View Document |
| 4 | March 16, 2012 | BINTZ 2012 RSU GRANT | View Document |
| 4 | March 16, 2012 | ZAGER 2012 RSU GRANT | View Document |
| 4 | March 8, 2012 | MARCH 8 2012 PURCHASE | View Document |
| 8-K | March 6, 2012 | 8-K | View Document |
| 10-K | Feb. 29, 2012 | 10-K | View Document |
| 8-K | Feb. 24, 2012 | 8-K | View Document |
| 4 | Feb. 14, 2012 | FLYNN FEB 2011 SALE | View Document |
| SC 13G/A | Feb. 14, 2012 | - | View Document |
| 4 | Feb. 13, 2012 | PURCHASE FEB 2012 | View Document |
| SC 13G/A | Feb. 13, 2012 | - | View Document |
| SC 13G | Feb. 13, 2012 | 13-G FILING AS OF DECEMBER 31, 2011 | View Document |
| SC 13G/A | Feb. 8, 2012 | AXCELIS TECHNOLOGIES INC 13G-A 3 | View Document |
| SC 13G/A | Feb. 8, 2012 | AXCELIS TECHNOLOGIES INC 13G-A 3 | View Document |
| 8-K | Feb. 8, 2012 | 8-K | View Document |
| 4 | Feb. 7, 2012 | FALLON FEB 7 2012 SALE | View Document |
| 8-K | Feb. 2, 2012 | 8-K | View Document |
| 4/A | Jan. 19, 2012 | AMDMT ZAGER RSU VEST JAN 2012 | View Document |
| 4 | Jan. 18, 2012 | ZAGER RSU VEST JAN 2012 | View Document |
| 8-K | Jan. 3, 2012 | 8-K | View Document |
| 15-12G | Nov. 8, 2011 | 15-12G | View Document |
| 10-Q | Nov. 4, 2011 | 10-Q | View Document |
| 8-K | Oct. 25, 2011 | 8-K | View Document |
| 4 | Sept. 20, 2011 | BINTZ FORM 4 RSU VEST SEPT 2011 | View Document |
| 10-Q | Aug. 5, 2011 | 10-Q | View Document |
| 3 | Aug. 4, 2011 | KEITHLEY FORM 3 | View Document |
| 8-K | Aug. 4, 2011 | 8-K | View Document |
| 4 | Aug. 4, 2011 | KEITHLEY INITIAL OPTION GRANT | View Document |
| 4 | July 19, 2011 | BINTZ FORM 4 RSU VEST AND STOCK OPTION GRANT JULY 15 2011 | View Document |
| 4 | July 18, 2011 | HARDIS FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | FALLON FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | FLYNN FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | BREWER FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | ZAGER FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | PUMA FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | FLETCHER FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | JENNINGS FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | NETTLES FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | THOMPSON FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 18, 2011 | BRAUN FORM 4 OPTION GRANT JULY 2011 | View Document |
| 4 | July 5, 2011 | FLYNN FORM 4 RSU VEST JULY 2011 | View Document |
| 4 | July 5, 2011 | PUMA RSU VEST FORM 4 JULY 2011 | View Document |
| 4 | July 5, 2011 | FALLON FORM 4 RSU VEST JULY 2011 | View Document |
| 4 | July 5, 2011 | BREWER FORM 4 RSU VEST JULY 2011 | View Document |
| 10-Q | May 6, 2011 | 10-Q | View Document |
| 8-K | April 27, 2011 | 8-K | View Document |
| 8-K | April 7, 2011 | 8-K | View Document |
| ARS | March 30, 2011 | AUTO-GENERATED PAPER DOCUMENT | View Document |
| DEF 14A | March 24, 2011 | DEF 14A | View Document |
| 10-K | March 14, 2011 | 10-K | View Document |
| 4 | Feb. 18, 2011 | FLETCHER FEB 2011 PURCHASE | View Document |
| SC 13G/A | Feb. 14, 2011 | DOC ONE | View Document |
| SC 13G/A | Feb. 14, 2011 | SCHNEIDER CAPITAL MANAGEMENT CORPORATION FORM 13G/A | View Document |
| SC 13G | Feb. 11, 2011 | 13G FILING DECEMBER 31, 2010 | View Document |
| 4 | Feb. 9, 2011 | WILD PURCHASE FEB 2011 | View Document |
| 4 | Feb. 9, 2011 | FLYNN FEB 2011 FORM 4 | View Document |
| 4 | Feb. 7, 2011 | JENNINGS PURCHASE FEB 4 2011 | View Document |
| 4 | Feb. 4, 2011 | ZAGER PURCHASE FEB 4 2011 | View Document |
| 4 | Feb. 4, 2011 | HARDIS PURCHASE FEB 4 2011 | View Document |
| 4 | Feb. 4, 2011 | PUMA FEB 4 PURCHASE | View Document |
| 3 | Feb. 3, 2011 | BRAUN FORM 3 | View Document |
| 4 | Feb. 3, 2011 | BRAUN INITIAL OPTION GRANT | View Document |
| SC 13G | Feb. 2, 2011 | - | View Document |
| 8-K | Feb. 2, 2011 | 8-K | View Document |
| 8-K | Feb. 1, 2011 | 8-K | View Document |
| SC 13G/A | Jan. 31, 2011 | AXCELIS TECHNOLOGIES, INC. 13G/A | View Document |
| 3/A | Jan. 18, 2011 | ZAGER FORM 3A WITH POA | View Document |
| 8-K | Jan. 18, 2011 | 8-K | View Document |
| 3 | Jan. 18, 2011 | - | View Document |
| 4 | Jan. 18, 2011 | ZAGER INITIAL FORM 4 | View Document |
| 4 | Dec. 17, 2010 | BINTZ DEC 2010 SALE | View Document |
| 4 | Dec. 10, 2010 | FLYNN SALE DECEMBER 2010 | View Document |
| 4 | Dec. 10, 2010 | BREWER DEC SALE | View Document |
| 4 | Dec. 7, 2010 | FALLON DEC 7 SALE | View Document |
| 4 | Dec. 2, 2010 | BREWER NOV SALE #2 | View Document |
| 4 | Dec. 1, 2010 | FLYNN SALE #2 NOVEMBER 2010 | View Document |
| 4 | Nov. 24, 2010 | BREWER NOV SALE | View Document |
| 4 | Nov. 22, 2010 | FALLON NOV 19 SALE | View Document |
| 4/A | Nov. 12, 2010 | FALLON NOVEMBER 2010 RSU VEST (AMENDED) | View Document |
| 4 | Nov. 12, 2010 | BINTZ NOV 2010 RSU VEST | View Document |
| 4 | Nov. 12, 2010 | BREWER NOV 2010 RSU VEST | View Document |
| 4 | Nov. 12, 2010 | FLYNN NOV 2010 RSU VEST | View Document |
| 4 | Nov. 12, 2010 | BASSETT NOV 2010 RSU VEST | View Document |
| 4 | Nov. 9, 2010 | FLYNN SALE NOVEMBER 2010 | View Document |
| 4 | Nov. 9, 2010 | FALLON NOVEMBER 2010 RSU VEST | View Document |
| 10-Q | Nov. 5, 2010 | 10-Q | View Document |
| 8-K | Nov. 3, 2010 | 8-K | View Document |
| 8-K | Sept. 30, 2010 | 8-K | View Document |
| 4 | Sept. 20, 2010 | BINTZ SEPT 17 2010 RSU VEST | View Document |
| 4/A | Sept. 20, 2010 | FLYNN JULY 2010 RSU VEST CORRECTED | View Document |
| 4 | Sept. 7, 2010 | THOMPSON SEPT 2010 PURCHASE | View Document |
| 4 | Sept. 1, 2010 | HARDIS AUGUST PURCHASE (3) | View Document |
| 4 | Aug. 27, 2010 | JENNINGS AUGUST 2010 PURCHASE | View Document |
| 4 | Aug. 23, 2010 | HARDIS AUGUST PURCHASE (2) | View Document |