SEC Filings for AMTECH SYSTEMS INC (ASYS)

Last updated: 2026-03-24 13:08 UTC | Total filings: 949

Browse the latest SEC filings and forms submitted by AMTECH SYSTEMS INC (ASYS). Access annual reports, quarterly statements, and other official disclosures.

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Form Filing Date Description Link
EFFECT March 23, 2026 - View Document
S-3 March 13, 2026 S-3 View Document
4 March 6, 2026 4 View Document
4 March 6, 2026 4 View Document
4 March 6, 2026 4 View Document
8-K March 6, 2026 8-K View Document
4 March 6, 2026 OWNERSHIP DOCUMENT View Document
SCHEDULE 13G/A Feb. 13, 2026 - View Document
8-K Feb. 5, 2026 8-K View Document
10-Q Feb. 5, 2026 10-Q View Document
DEF 14A Jan. 23, 2026 DEF 14A View Document
ARS Jan. 23, 2026 ARS View Document
SCHEDULE 13G/A Jan. 21, 2026 - View Document
8-K Dec. 15, 2025 8-K View Document
10-K Dec. 10, 2025 10-K View Document
8-K Dec. 10, 2025 8-K View Document
8-K Dec. 1, 2025 8-K View Document
8-K Dec. 1, 2025 8-K View Document
4 Sept. 3, 2025 OWNERSHIP DOCUMENT View Document
4 Aug. 15, 2025 4 View Document
8-K Aug. 6, 2025 8-K View Document
10-Q Aug. 6, 2025 10-Q View Document
SD May 30, 2025 SD View Document
4 May 16, 2025 OWNERSHIP DOCUMENT View Document
4 May 16, 2025 4 View Document
8-K May 12, 2025 8-K View Document
10-Q May 12, 2025 10-Q View Document
8-K April 9, 2025 8-K View Document
SCHEDULE 13G/A April 4, 2025 - View Document
4 March 21, 2025 4 View Document
S-8 March 19, 2025 S-8 View Document
4 March 12, 2025 OWNERSHIP DOCUMENT View Document
4 March 7, 2025 4 View Document
8-K March 7, 2025 8-K View Document
4 March 7, 2025 OWNERSHIP DOCUMENT View Document
4 March 7, 2025 4 View Document
4 March 7, 2025 4 View Document
4 March 5, 2025 OWNERSHIP DOCUMENT View Document
DEFA14A Feb. 24, 2025 DEFA14A View Document
4 Feb. 18, 2025 OWNERSHIP DOCUMENT View Document
SCHEDULE 13D/A Feb. 18, 2025 - View Document
SCHEDULE 13G/A Feb. 12, 2025 - View Document
SCHEDULE 13G/A Feb. 11, 2025 - View Document
4 Feb. 10, 2025 OWNERSHIP DOCUMENT View Document
10-Q Feb. 5, 2025 10-Q View Document
8-K Feb. 5, 2025 8-K View Document
3 Feb. 3, 2025 3 View Document
SCHEDULE 13G/A Jan. 28, 2025 - View Document
DEF 14A Jan. 24, 2025 DEF 14A View Document
ARS Jan. 24, 2025 ARS View Document
8-K Jan. 23, 2025 8-K View Document
4 Dec. 13, 2024 OWNERSHIP DOCUMENT View Document
10-K Dec. 12, 2024 10-K View Document
8-K Dec. 9, 2024 8-K View Document
SC 13G Nov. 12, 2024 - View Document
SC 13G/A Oct. 31, 2024 SEC SCHEDULE 13G View Document
SC 13G/A Oct. 15, 2024 - View Document
8-K Sept. 17, 2024 8-K View Document
SC 13G/A Sept. 6, 2024 - View Document
4 Aug. 16, 2024 4 View Document
4 Aug. 13, 2024 OWNERSHIP DOCUMENT View Document
3 Aug. 9, 2024 3 View Document
4 Aug. 9, 2024 4 View Document
8-K Aug. 7, 2024 8-K View Document
10-Q Aug. 7, 2024 10-Q View Document
SD May 29, 2024 SD View Document
4 May 14, 2024 OWNERSHIP DOCUMENT View Document
SC 13D/A May 14, 2024 SC 13D/A View Document
8-K May 8, 2024 8-K View Document
10-Q May 8, 2024 10-Q View Document
4 March 18, 2024 4 View Document
4 March 13, 2024 4 View Document
8-K March 8, 2024 8-K View Document
4 March 8, 2024 OWNERSHIP DOCUMENT View Document
4 March 8, 2024 4 View Document
4 March 8, 2024 4 View Document
8-K March 5, 2024 8-K View Document
4 March 4, 2024 4 View Document
4 March 4, 2024 4 View Document
4 March 4, 2024 4 View Document
4 March 4, 2024 OWNERSHIP DOCUMENT View Document
8-K Feb. 29, 2024 8-K View Document
UPLOAD Feb. 15, 2024 - View Document
4 Feb. 15, 2024 4 View Document
4 Feb. 14, 2024 OWNERSHIP DOCUMENT View Document
SC 13G/A Feb. 12, 2024 ASYS 13GA 2023 FILING View Document
CORRESP Feb. 9, 2024 - View Document
SC 13G Feb. 9, 2024 - View Document
SC 13G/A Feb. 9, 2024 SEC SCHEDULE 13G View Document
10-Q Feb. 9, 2024 10-Q View Document
8-K Feb. 9, 2024 8-K View Document
UPLOAD Feb. 1, 2024 - View Document
ARS Jan. 24, 2024 ARS View Document
SC 13G/A Jan. 23, 2024 - View Document
DEF 14A Jan. 19, 2024 DEF 14A View Document
4 Dec. 20, 2023 OWNERSHIP DOCUMENT View Document
4 Dec. 19, 2023 FORM 4 SUBMISSION View Document
8-K Dec. 14, 2023 8-K View Document
10-K Dec. 14, 2023 10-K View Document
8-K Dec. 13, 2023 8-K View Document
8-K Dec. 11, 2023 8-K View Document
4 Aug. 25, 2023 FORM 4 SUBMISSION View Document
4 Aug. 21, 2023 OWNERSHIP DOCUMENT View Document
8-K/A Aug. 17, 2023 8-K/A View Document
4 Aug. 16, 2023 FORM 4 SUBMISSION View Document
4 Aug. 16, 2023 FORM 4 SUBMISSION View Document
4 Aug. 15, 2023 FORM 4 SUBMISSION View Document
4 Aug. 14, 2023 OWNERSHIP DOCUMENT View Document
10-Q Aug. 9, 2023 10-Q View Document
8-K Aug. 9, 2023 8-K View Document
4 July 7, 2023 FORM 4 SUBMISSION View Document
SD May 31, 2023 SD View Document
4 May 25, 2023 OWNERSHIP DOCUMENT View Document
4 May 23, 2023 FORM 4 SUBMISSION View Document
4 May 18, 2023 OWNERSHIP DOCUMENT View Document
4 May 16, 2023 FORM 4 SUBMISSION View Document
4 May 15, 2023 OWNERSHIP DOCUMENT View Document
10-Q May 10, 2023 10-Q View Document
8-K May 10, 2023 8-K View Document
8-K/A April 3, 2023 8-K/A View Document
4 March 14, 2023 FORM 4 View Document
4 March 3, 2023 FORM 4 SUBMISSION View Document
4 March 3, 2023 FORM 4 SUBMISSION View Document
8-K March 3, 2023 8-K View Document
4 March 3, 2023 FORM 4 SUBMISSION View Document
4 March 3, 2023 OWNERSHIP DOCUMENT View Document
SC 13G/A Feb. 13, 2023 ASYS 13GA FILING View Document
4 Feb. 13, 2023 OWNERSHIP DOCUMENT View Document
SC 13G/A Feb. 10, 2023 SEC SCHEDULE 13G View Document
8-K Feb. 8, 2023 8-K View Document
10-Q Feb. 8, 2023 10-Q View Document
SC 13G/A Feb. 7, 2023 - View Document
SC 13G/A Jan. 23, 2023 - View Document
DEF 14A Jan. 20, 2023 DEF 14A View Document
4 Jan. 18, 2023 FORM 4 SUBMISSION View Document
8-K Jan. 18, 2023 8-K View Document
3 Jan. 18, 2023 FORM 3 SUBMISSION View Document
8-K Jan. 17, 2023 8-K View Document
4 Dec. 5, 2022 FORM 4 SUBMISSION View Document
4 Dec. 5, 2022 FORM 4 SUBMISSION View Document
8-K Nov. 30, 2022 8-K View Document
10-K Nov. 30, 2022 10-K View Document
4 Nov. 30, 2022 FORM 4 SUBMISSION View Document
4 Nov. 30, 2022 FORM 4 SUBMISSION View Document
4 Oct. 14, 2022 FORM 4 SUBMISSION View Document
4 Sept. 13, 2022 OWNERSHIP DOCUMENT View Document
4 Sept. 6, 2022 OWNERSHIP DOCUMENT View Document
8-K Aug. 26, 2022 8-K View Document
4 Aug. 25, 2022 FORM 4 SUBMISSION View Document
4 Aug. 25, 2022 FORM 4 SUBMISSION View Document
10-Q Aug. 15, 2022 10-Q View Document
8-K Aug. 15, 2022 8-K View Document
SD May 26, 2022 SD View Document
4 May 17, 2022 OWNERSHIP DOCUMENT View Document
8-K May 11, 2022 8-K View Document
10-Q May 11, 2022 10-Q View Document
8-K April 28, 2022 8-K View Document
S-8 March 25, 2022 S-8 View Document
4 March 4, 2022 FORM 4 SUBMISSION View Document
4 March 4, 2022 FORM 4 SUBMISSION View Document
4 March 4, 2022 FORM 4 SUBMISSION View Document
4 March 4, 2022 OWNERSHIP DOCUMENT View Document
8-K March 4, 2022 8-K View Document
SC 13D/A Feb. 24, 2022 SC 13D/A View Document
4 Feb. 24, 2022 FORM 4 View Document
10-Q Feb. 14, 2022 10-Q View Document
8-K Feb. 14, 2022 8-K View Document
SC 13G/A Feb. 14, 2022 ASYS 2021 SC13GA View Document
SC 13G/A Feb. 9, 2022 SCHEDULE 13G/A View Document
SC 13G/A Feb. 8, 2022 SEC SCHEDULE 13G View Document
DEF 14A Jan. 18, 2022 DEF 14A View Document
SC 13G/A Jan. 14, 2022 - View Document
4 Nov. 24, 2021 OWNERSHIP DOCUMENT View Document
8-K Nov. 19, 2021 8-K View Document
4 Nov. 18, 2021 FORM 4 SUBMISSION View Document
4 Nov. 18, 2021 FORM 4 SUBMISSION View Document
10-K Nov. 17, 2021 10-K View Document
8-K Nov. 17, 2021 8-K View Document
4 Sept. 10, 2021 FORM 4 SUBMISSION View Document
4 Sept. 7, 2021 FORM 4 SUBMISSION View Document
4 Aug. 13, 2021 FORM 4 SUBMISSION View Document
3 Aug. 13, 2021 FORM 3 SUBMISSION View Document
8-K Aug. 12, 2021 8-K View Document
4 Aug. 12, 2021 OWNERSHIP DOCUMENT View Document
4 Aug. 10, 2021 FORM 4 View Document
10-Q Aug. 4, 2021 10-Q View Document
8-K Aug. 4, 2021 8-K View Document
SD May 21, 2021 SD View Document
8-K May 5, 2021 8-K View Document
10-Q May 5, 2021 10-Q View Document
8-K April 26, 2021 8-K View Document
8-K April 15, 2021 8-K View Document
8-K March 26, 2021 8-K View Document
4 March 25, 2021 FORM 4 SUBMISSION View Document
4 March 25, 2021 FORM 4 SUBMISSION View Document
4 March 25, 2021 OWNERSHIP DOCUMENT View Document
SC 13D/A Feb. 18, 2021 - View Document
SC 13G/A Feb. 12, 2021 SEC SCHEDULE 13G View Document
10-Q Feb. 11, 2021 10-Q View Document
8-K Feb. 11, 2021 8-K View Document
SC 13G/A Feb. 10, 2021 ASYS 13GA FILING View Document
SC 13G Feb. 10, 2021 SCHEDULE 13G View Document
DEF 14A Jan. 28, 2021 DEF 14A View Document
8-K Dec. 17, 2020 8-K View Document
4 Dec. 4, 2020 FORM 4 SUBMISSION View Document
8-K Nov. 19, 2020 8-K View Document
10-K Nov. 19, 2020 10-K View Document
4 Nov. 19, 2020 FORM 4 SUBMISSION View Document
4 Nov. 19, 2020 FORM 4 SUBMISSION View Document
4 Nov. 19, 2020 FORM 4 SUBMISSION View Document
8-K Sept. 25, 2020 8-K View Document
4 Aug. 12, 2020 FORM 4 View Document
10-Q Aug. 6, 2020 10-Q View Document
8-K Aug. 6, 2020 8-K View Document
SD May 29, 2020 SD View Document
8-K May 7, 2020 8-K View Document
10-Q May 7, 2020 10-Q View Document
8-K May 7, 2020 8-K View Document
4 March 16, 2020 FORM 4 SUBMISSION View Document
4 March 12, 2020 FORM 4 SUBMISSION View Document
4 March 5, 2020 FORM 4 View Document
4 March 5, 2020 FORM 4 SUBMISSION View Document
4 March 5, 2020 FORM 4 SUBMISSION View Document
4 March 5, 2020 FORM 4 SUBMISSION View Document
8-K March 4, 2020 8-K ANNUAL SHAREHOLDER MEETING RESULTS View Document
4 March 3, 2020 FORM 4 SUBMISSION View Document
4 March 3, 2020 FORM 4 SUBMISSION View Document
4 Feb. 27, 2020 FORM 4 View Document
SC 13G/A Feb. 13, 2020 ASYS 13G AMENDMENT NO 1 View Document
4 Feb. 12, 2020 FORM 4 View Document
SC 13G/A Feb. 12, 2020 SCHEDULE 13G/A View Document
SC 13G Feb. 12, 2020 - View Document
10-Q Feb. 6, 2020 10-Q View Document
8-K Feb. 6, 2020 8-K--EARNINGS, BUYBACK, EXEC COMP View Document
SC 13G/A Feb. 4, 2020 - View Document
SC 13D/A Jan. 30, 2020 SC 13D/A View Document
8-K Jan. 28, 2020 8-K SALE OF TEMPRESS & EXECUTIVE CHANGES View Document
DEF 14A Jan. 24, 2020 DEF 14A View Document
SC 13D Dec. 11, 2019 - View Document
SC 13D Nov. 25, 2019 SCHEDULE 13D View Document
8-K Nov. 22, 2019 8-K View Document
10-K Nov. 21, 2019 10-K View Document
8-K Nov. 21, 2019 8-K View Document
4 Aug. 30, 2019 FORM 4 View Document
8-K Aug. 8, 2019 8-K 3Q19 ASYS EARNINGS RELEASE View Document
10-Q Aug. 8, 2019 10-Q ASYS 3Q19 View Document
SD May 31, 2019 ASYS 2018 FORM SD View Document
10-Q May 9, 2019 10-Q ASYS 2Q19 View Document
8-K May 9, 2019 8-K ASYS 2Q19 EARNINGS RELEASE View Document
8-K April 3, 2019 8-K APRIL 2019 ANNOUNCEMENT View Document
4 March 8, 2019 FORM 4 View Document
4 March 8, 2019 FORM 4 View Document
8-K March 8, 2019 8-K ANNUAL SHAREHOLDER MEETING RESULTS View Document
4 March 8, 2019 FORM 4 View Document
4 March 8, 2019 FORM 4 View Document
4 March 8, 2019 FORM 4 View Document
4 March 8, 2019 FORM 4 View Document
SC 13G Feb. 8, 2019 SCHEDULE 13G View Document
8-K Feb. 7, 2019 8-K ASYS 1Q19 EARNINGS RELEASE View Document
10-Q Feb. 7, 2019 ASYS 1Q19 10-Q View Document
DEF 14A Jan. 25, 2019 DEF 14A ASYS 2019 ANNUAL MEETING View Document
SC 13G/A Jan. 14, 2019 - View Document
4 Dec. 7, 2018 FORM 4 View Document
10-K Dec. 7, 2018 2018 ASYS 10-K View Document
8-K Nov. 29, 2018 8-K OFFICER ANNOUNCEMENT View Document
3 Nov. 29, 2018 FORM 3 View Document
4 Nov. 29, 2018 FORM 4 View Document
4 Nov. 29, 2018 FORM 4 View Document
4 Nov. 29, 2018 FORM 4 View Document
8-K Nov. 29, 2018 8-K 4Q18 EARNINGS RELEASE View Document
4 Nov. 29, 2018 FORM 4 View Document
SC 13D/A Nov. 27, 2018 SCHEDULE 13D AMENDMENT NO. 4 View Document
4 Nov. 21, 2018 FORM 4 View Document
8-K Aug. 9, 2018 ASYS 3Q18 8-K EARNINGS RELEASE View Document
10-Q Aug. 9, 2018 ASYS 3Q18 10-Q View Document
SC 13D/A July 17, 2018 SCHEDULE 13D AMENDMENT NO. 3 View Document
4 June 4, 2018 FORM 4 View Document
4 June 1, 2018 FORM 4 View Document
4 June 1, 2018 FORM 4 View Document
SD May 31, 2018 ASYS 2017 CONFLICT MINERALS REPORT View Document
4 May 15, 2018 FORM 4 View Document
8-K May 15, 2018 8-K 2018 ANNUAL MEETING RESULTS View Document
4 May 15, 2018 FORM 4 View Document
4 May 15, 2018 FORM 4 View Document
4 May 15, 2018 FORM 4 View Document
4 May 15, 2018 FORM 4 View Document
4 May 15, 2018 FORM 4 View Document
10-Q May 10, 2018 ASYS 2Q18 10-Q View Document
8-K May 10, 2018 ASYS 2Q18 EARNINGS RELEASE 8-K View Document
DEF 14A April 5, 2018 DEF 14A View Document
8-K April 3, 2018 8-K APRIL 2018 STOCK REPURCHASE ANNOUNCEMENT View Document
CT ORDER March 20, 2018 - View Document
8-K March 16, 2018 8-K View Document
8-K Feb. 8, 2018 8-K 1Q18 EARNINGS RELEASE View Document
10-Q Feb. 8, 2018 10-Q 1Q18 QUARTERLY REPORT View Document
10-K/A Jan. 26, 2018 10-K/A FISCAL YEAR 2017 View Document
4 Jan. 19, 2018 FORM 4 View Document
8-K Jan. 18, 2018 8-K View Document
3 Jan. 12, 2018 FORM 3 View Document
3 Jan. 12, 2018 FORM 3 View Document
8-K Jan. 10, 2018 8-K OFFICER APPOINTMENTS View Document
SC 13G/A Jan. 3, 2018 - View Document
SC 13D/A Dec. 18, 2017 SCHEDULE 13D AMENDMENT NO. 2 View Document
8-K Dec. 18, 2017 8-K 10B5-1 PLANS View Document
4 Dec. 15, 2017 FORM 4 View Document
4/A Dec. 15, 2017 FORM 4/A View Document
4 Dec. 15, 2017 FORM 4 View Document
4 Nov. 29, 2017 FORM 4 View Document
4 Nov. 27, 2017 FORM 4 View Document
8-K Nov. 20, 2017 8-K 4Q17 EARNINGS RELEASE View Document
10-K Nov. 20, 2017 2017 ASYS 10-K View Document
SC 13D/A Aug. 24, 2017 SCHEDULE 13D AMENDMENT NO. 1 View Document
8-K Aug. 23, 2017 FORM 8-K View Document
424B5 Aug. 18, 2017 424B5 View Document
8-K Aug. 18, 2017 8-K OFFERING ANNOUNCMENT View Document
8-K Aug. 18, 2017 8-K OFFERING PRICING View Document
424B5 Aug. 17, 2017 424B5 View Document
8-K Aug. 9, 2017 8-K ASYS 3Q17 EARNINGS RELEASE View Document
10-Q Aug. 9, 2017 3Q17 ASYS 10-Q View Document
4 June 9, 2017 FORM 4 View Document
SD May 31, 2017 SD View Document
10-Q May 10, 2017 10-Q View Document
8-K May 10, 2017 8-K View Document
8-K April 25, 2017 8-K View Document
4 March 21, 2017 FORM 4 View Document
4 March 21, 2017 FORM 4 View Document
4 March 21, 2017 FORM 4 View Document
4 March 21, 2017 FORM 4 View Document
4 March 21, 2017 FORM 4 View Document
8-K March 20, 2017 8-K 2017 ANNUAL MEETING VOTES View Document
4 Feb. 17, 2017 OWNERSHIP DOCUMENT View Document
10-Q Feb. 9, 2017 10-Q View Document
EFFECT Feb. 6, 2017 - View Document
CORRESP Feb. 2, 2017 - View Document
S-3/A Feb. 2, 2017 S-3/A View Document
DEF 14A Jan. 27, 2017 DEF 14A View Document
8-K Jan. 24, 2017 JANUARY 2017 ORDERS View Document
S-3 Jan. 18, 2017 S-3 View Document
SC 13G/A Jan. 3, 2017 - View Document
10-K/A Dec. 2, 2016 10-K/A View Document
10-K Nov. 30, 2016 10-K View Document
4 Nov. 18, 2016 FORM 4 View Document
8-K Nov. 17, 2016 8-K CURRENT REPORT, ITEMS 2.02 AND 9.01 View Document
8-K Nov. 16, 2016 8-K CURRENT REPORT, ITEMS 5.02, 9.01 View Document
10-Q Aug. 4, 2016 10-Q View Document
SD May 26, 2016 SD View Document
10-Q May 5, 2016 10-Q View Document
3 April 4, 2016 FORM 3 View Document
SC 13D/A March 18, 2016 SCHEDULE 13D/A View Document
UPLOAD March 18, 2016 - View Document
8-K March 14, 2016 8-K ITEMS 5.02, 5.07 AND 7.01 View Document
DEFR14A March 3, 2016 DEFR14A View Document
10-K/A March 3, 2016 10-K/A View Document
8-K Feb. 25, 2016 8-K CURRENT REPORT, ITEMS 5.02, 7.01, 9.01 View Document
4 Feb. 23, 2016 FORM 4 View Document
CORRESP Feb. 17, 2016 - View Document
8-K Feb. 9, 2016 8-K View Document
10-Q Feb. 9, 2016 10-Q View Document
8-K Feb. 4, 2016 ASYS 2016 EARNINGS RELEASE View Document
UPLOAD Feb. 2, 2016 - View Document
DEF 14A Jan. 25, 2016 DEF 14A View Document
SC 13D Jan. 25, 2016 SCHEDULE 13D View Document
4 Jan. 20, 2016 FORM 4 View Document
8-K Jan. 20, 2016 JAN 16 BOD APPOINTMENT View Document
5 Jan. 11, 2016 FORM 5 View Document
SC 13G/A Jan. 7, 2016 - View Document
8-K Dec. 9, 2015 8-K View Document
4 Nov. 19, 2015 FORM 4 View Document
4 Nov. 19, 2015 FORM 4 View Document
4 Nov. 19, 2015 FORM 4 View Document
4 Nov. 19, 2015 FORM 4 View Document
4 Nov. 19, 2015 FORM 4 View Document
4 Nov. 19, 2015 FORM 4 View Document
4 Nov. 19, 2015 FORM 4 View Document
4 Nov. 19, 2015 FORM 4 View Document
8-K Nov. 19, 2015 OFFICER COMPENSATION View Document
10-K Nov. 19, 2015 10-K View Document
4 Nov. 4, 2015 FORM 4 View Document
4 Oct. 20, 2015 FORM 4 View Document
4 Oct. 13, 2015 FORM 4 View Document
8-K Oct. 8, 2015 8-K LETTER AGREEMENT View Document
8-K Oct. 5, 2015 8-K View Document
4 Sept. 15, 2015 PRIMARY DOCUMENT View Document
SC 13G/A Aug. 27, 2015 SCHEDULE 13G AMENDMENT NO. 5 View Document
3 Aug. 27, 2015 FORM 3 View Document
4 Aug. 26, 2015 FORM 4 View Document
10-Q Aug. 6, 2015 10-Q View Document
8-K July 22, 2015 8-K View Document
4 June 26, 2015 FORM 4 View Document
4 June 18, 2015 FORM 4 View Document
3 June 12, 2015 FORM 3 View Document
SC 13G/A June 12, 2015 SCHEDULE 13G AMENDMENT NO. 4 View Document
SD May 29, 2015 SD View Document
4 May 27, 2015 PRIMARY DOCUMENT View Document
4 May 27, 2015 PRIMARY DOCUMENT View Document
4 May 26, 2015 PRIMARY DOCUMENT View Document
4 May 22, 2015 PRIMARY DOCUMENT View Document
S-8 May 22, 2015 S-8 View Document
4 May 21, 2015 FORM 4 View Document
4 May 13, 2015 FORM 4 View Document
10-Q May 7, 2015 10-Q View Document
4 April 21, 2015 FORM 4 View Document
8-K/A April 13, 2015 8-K/A View Document
4 April 13, 2015 PRIMARY DOCUMENT View Document
3 April 13, 2015 PRIMARY DOCUMENT View Document
8-K April 10, 2015 8-K View Document
4 March 31, 2015 FORM 4 View Document
4/A March 23, 2015 FORM 4/A View Document
4 March 19, 2015 FORM 4 View Document
4 March 17, 2015 FORM 4 View Document
4 March 13, 2015 FORM 4 View Document
ARS March 12, 2015 AUTO-GENERATED PAPER DOCUMENT View Document
8-K March 12, 2015 FORM 8-K View Document
DEF 14A March 11, 2015 DEF 14A View Document
4 March 9, 2015 FORM 4 View Document
SC 13G/A March 9, 2015 - View Document
4 March 4, 2015 FORM 4 View Document
4 Feb. 25, 2015 FORM 4 View Document
4 Feb. 25, 2015 FORM 4 View Document
3 Feb. 25, 2015 FORM 3 View Document
3 Feb. 25, 2015 FORM 3 View Document
3 Feb. 25, 2015 FORM 3 View Document
SC 13G/A Feb. 25, 2015 SCHEDULE 13 G AMENDMENT NO. 3 View Document
8-K Feb. 23, 2015 FORM 8-K View Document
SC 13G/A Feb. 17, 2015 SCHEDULE 13G AMENDMENT NO. 2 View Document
4 Feb. 9, 2015 FORM 4 View Document
SC 13D Feb. 9, 2015 SCHEDULE 13D View Document
4 Feb. 9, 2015 FORM 4 View Document
4 Feb. 9, 2015 FORM 4 View Document
10-Q Feb. 5, 2015 10-Q View Document
4 Feb. 2, 2015 FORM 4 SUBMISSION View Document
8-K Feb. 2, 2015 FORM 8-K View Document
3 Feb. 2, 2015 FORM 3 SUBMISSION View Document
4 Jan. 27, 2015 FORM 4 View Document
425 Jan. 16, 2015 FORM 8-K View Document
8-K Jan. 16, 2015 FORM 8-K View Document
DEFA14A Jan. 16, 2015 DEFINITIVE ADDITIONAL MATERIALS View Document
425 Jan. 15, 2015 425 View Document
425 Jan. 13, 2015 - View Document
SC 13G Jan. 5, 2015 - View Document
4 Dec. 29, 2014 FORM 4 View Document
424B3 Dec. 23, 2014 PROSPECTUS View Document
DEFM14A Dec. 23, 2014 DEFINITIVE PROXY STATEMENT View Document
EFFECT Dec. 22, 2014 - View Document
S-4/A Dec. 19, 2014 AMENDMENT NO. 1 TO FORM S-4 View Document
4 Dec. 18, 2014 FORM 4 View Document
10-K/A Dec. 9, 2014 10-K/A View Document
4 Dec. 1, 2014 FORM 4 View Document
425 Nov. 24, 2014 425 View Document
S-4 Nov. 24, 2014 FORM S-4 View Document
425 Nov. 21, 2014 425 View Document
4 Nov. 21, 2014 PRIMARY DOCUMENT View Document
4 Nov. 21, 2014 PRIMARY DOCUMENT View Document
4 Nov. 21, 2014 PRIMARY DOCUMENT View Document
4 Nov. 21, 2014 PRIMARY DOCUMENT View Document
4 Nov. 21, 2014 PRIMARY DOCUMENT View Document
4 Nov. 21, 2014 PRIMARY DOCUMENT View Document
8-K Nov. 21, 2014 8-K View Document
4 Nov. 21, 2014 PRIMARY DOCUMENT View Document
8-K Nov. 21, 2014 8-K View Document
10-K Nov. 20, 2014 10-K View Document
425 Oct. 23, 2014 425 View Document
8-K Oct. 23, 2014 FORM 8-K View Document
425 Oct. 23, 2014 FORM 8-K View Document
4 Oct. 7, 2014 FORM 4 View Document
UPLOAD Sept. 2, 2014 - View Document
CORRESP Aug. 29, 2014 - View Document
UPLOAD Aug. 18, 2014 - View Document
4 Aug. 8, 2014 FORM 4 View Document
10-Q Aug. 7, 2014 10-Q View Document
S-8 June 20, 2014 S-8 View Document
S-8 June 20, 2014 S-8 View Document
SD June 2, 2014 SD View Document
4 May 22, 2014 FORM 4 View Document
8-K May 14, 2014 8-K View Document
10-Q May 7, 2014 10-Q View Document
ARS April 2, 2014 AUTO-GENERATED PAPER DOCUMENT View Document
DEF 14A March 28, 2014 DEF 14A View Document
4 March 14, 2014 PRIMARY DOCUMENT View Document
4 March 7, 2014 PRIMARY DOCUMENT View Document
4 March 7, 2014 PRIMARY DOCUMENT View Document
4 March 7, 2014 PRIMARY DOCUMENT View Document
4 March 4, 2014 PRIMARY DOCUMENT View Document
4 March 4, 2014 PRIMARY DOCUMENT View Document
4 March 4, 2014 PRIMARY DOCUMENT View Document
4 Feb. 28, 2014 PRIMARY DOCUMENT View Document
4 Feb. 28, 2014 PRIMARY DOCUMENT View Document
4 Feb. 21, 2014 PRIMARY DOCUMENT View Document
4 Feb. 20, 2014 PRIMARY DOCUMENT View Document
4 Feb. 13, 2014 PRIMARY DOCUMENT View Document
4/A Feb. 13, 2014 PRIMARY DOCUMENT View Document
10-Q Feb. 6, 2014 10-Q View Document
10-K/A Jan. 24, 2014 10-K/A View Document
4 Jan. 8, 2014 FORM 4 View Document
3 Jan. 3, 2014 FORM 3 View Document
4 Jan. 3, 2014 FORM 4 View Document
3 Jan. 3, 2014 FORM 3 View Document
SC 13G/A Jan. 3, 2014 SCHEDULE 13G AMENDMENT NO. 1 View Document
3 Jan. 3, 2014 FORM 3 View Document
8-K Dec. 18, 2013 8-K View Document
4 Dec. 13, 2013 PRIMARY DOCUMENT View Document
4 Dec. 13, 2013 PRIMARY DOCUMENT View Document
4 Dec. 13, 2013 PRIMARY DOCUMENT View Document
4 Dec. 13, 2013 PRIMARY DOCUMENT View Document
4 Dec. 13, 2013 PRIMARY DOCUMENT View Document
4 Dec. 13, 2013 PRIMARY DOCUMENT View Document
4 Dec. 13, 2013 PRIMARY DOCUMENT View Document
10-K Dec. 11, 2013 10-K View Document
10-Q Aug. 8, 2013 10-Q View Document
8-K July 5, 2013 8-K View Document
8-K June 11, 2013 8-K View Document
10-Q May 9, 2013 10-Q View Document
SC 13G March 27, 2013 SCHEDULE 13G View Document
8-K March 12, 2013 VOTE OF SECURITY HOLDERS View Document
SC 13G/A Feb. 11, 2013 SCHEDULE 13G/A View Document
10-Q Feb. 7, 2013 FORM 10Q View Document
ARS Jan. 29, 2013 AUTO-GENERATED PAPER DOCUMENT View Document
DEF 14A Jan. 24, 2013 DEF 14A View Document
8-K Dec. 14, 2012 8-K View Document
4 Dec. 11, 2012 PRIMARY DOCUMENT View Document
4 Dec. 11, 2012 PRIMARY DOCUMENT View Document
4 Dec. 11, 2012 PRIMARY DOCUMENT View Document
4 Dec. 11, 2012 PRIMARY DOCUMENT View Document
4 Dec. 11, 2012 PRIMARY DOCUMENT View Document
4 Dec. 11, 2012 PRIMARY DOCUMENT View Document
4 Dec. 11, 2012 PRIMARY DOCUMENT View Document
4 Dec. 11, 2012 PRIMARY DOCUMENT View Document
4 Dec. 11, 2012 PRIMARY DOCUMENT View Document
10-K Dec. 7, 2012 10-K View Document
8-K Dec. 5, 2012 8-K View Document
8-K/A Dec. 3, 2012 8-K/A View Document
8-K Nov. 30, 2012 8-K View Document
8-K Nov. 8, 2012 8-K View Document
8-K Nov. 2, 2012 8-K View Document
10-Q Aug. 9, 2012 FORM 10-Q View Document
8-K July 6, 2012 CURRENT REPORT View Document
4 May 31, 2012 PRIMARY DOCUMENT View Document
10-Q May 10, 2012 FORM 10Q View Document
8-K March 20, 2012 VOTE OF SECURITY HOLDERS View Document
SC 13G/A Feb. 14, 2012 SCHEDULE 13G/A View Document
10-Q Feb. 9, 2012 FORM 10-Q View Document
ARS Feb. 1, 2012 AUTO-GENERATED PAPER DOCUMENT View Document
RW Jan. 23, 2012 REQUEST FOR WITHDRAWAL View Document
DEF 14A Jan. 23, 2012 - View Document
8-K Dec. 19, 2011 CURRENT REPORT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
4 Dec. 19, 2011 PRIMARY DOCUMENT View Document
8-K Nov. 17, 2011 CURRENT REPORT View Document
10-K Nov. 17, 2011 ANNUAL REPORT View Document
8-K Nov. 16, 2011 CURRENT REPORT View Document
8-K Oct. 17, 2011 CURRENT REPORT View Document
8-K Oct. 5, 2011 8-K View Document
EFFECT Sept. 14, 2011 - View Document
8-K/A Sept. 12, 2011 AMENDED 8-K View Document
8-K Sept. 9, 2011 - View Document
RW Sept. 9, 2011 REQUEST FOR WITHDRAWAL View Document
8-K Aug. 23, 2011 CURRENT REPORT View Document
4 Aug. 15, 2011 PRIMARY DOCUMENT View Document
S-3 Aug. 12, 2011 FORM S-3 View Document
4 Aug. 11, 2011 PRIMARY DOCUMENT View Document
4 Aug. 11, 2011 PRIMARY DOCUMENT View Document
10-Q Aug. 9, 2011 FORM 10-Q View Document
8-K July 13, 2011 CURRENT REPORT View Document
EFFECT May 13, 2011 - View Document
10-Q May 10, 2011 QUARTERLY REPORT View Document
8-K April 26, 2011 CURRENT REPORT View Document
4/A April 25, 2011 PRIMARY DOCUMENT View Document
4 April 22, 2011 PRIMARY DOCUMENT View Document
4 March 11, 2011 PRIMARY DOCUMENT View Document
4 March 3, 2011 PRIMARY DOCUMENT View Document
4 Feb. 28, 2011 PRIMARY DOCUMENT View Document
4 Feb. 28, 2011 PRIMARY DOCUMENT View Document
4 Feb. 18, 2011 PRIMARY DOCUMENT View Document
SC 13G/A Feb. 15, 2011 - View Document
4 Feb. 14, 2011 PRIMARY DOCUMENT View Document
SC 13G Feb. 11, 2011 SCHEDULE 13G View Document
10-Q Feb. 8, 2011 QUARTERLY REPORT View Document
S-3 Feb. 8, 2011 REGISTRATION STATEMENT FOR SPECIFIED TRANSACTIONS BY CERTAIN ISSUERS View Document
8-K Feb. 1, 2011 CURRENT REPORT View Document
SC 13D/A Jan. 31, 2011 SC 13D/A View Document
8-K Jan. 26, 2011 CURRENT REPORT View Document
SC 13G/A Jan. 10, 2011 - View Document
8-K Dec. 23, 2010 CURRENT REPORT View Document
ARS Dec. 22, 2010 AUTO-GENERATED PAPER DOCUMENT View Document
DEF 14A Dec. 21, 2010 DEFINITIVE PROXY STATEMENT View Document
4 Dec. 10, 2010 PRIMARY DOCUMENT View Document
4 Dec. 10, 2010 PRIMARY DOCUMENT View Document
4 Dec. 10, 2010 PRIMARY DOCUMENT View Document
4 Dec. 10, 2010 PRIMARY DOCUMENT View Document
4 Dec. 8, 2010 PRIMARY DOCUMENT View Document
4 Dec. 7, 2010 PRIMARY DOCUMENT View Document
4 Dec. 2, 2010 PRIMARY DOCUMENT View Document
4 Dec. 2, 2010 PRIMARY DOCUMENT View Document
4 Dec. 2, 2010 PRIMARY DOCUMENT View Document
4 Dec. 2, 2010 PRIMARY DOCUMENT View Document
4 Dec. 2, 2010 PRIMARY DOCUMENT View Document
4 Nov. 19, 2010 PRIMARY DOCUMENT View Document
8-K Nov. 18, 2010 CURRENT REPORT View Document
4 Nov. 15, 2010 PRIMARY DOCUMENT View Document
4 Nov. 15, 2010 PRIMARY DOCUMENT View Document
4 Nov. 15, 2010 PRIMARY DOCUMENT View Document
4 Nov. 15, 2010 PRIMARY DOCUMENT View Document
4 Nov. 15, 2010 PRIMARY DOCUMENT View Document
4 Nov. 15, 2010 PRIMARY DOCUMENT View Document
4 Nov. 15, 2010 PRIMARY DOCUMENT View Document
4 Nov. 15, 2010 PRIMARY DOCUMENT View Document
4 Nov. 15, 2010 PRIMARY DOCUMENT View Document
10-K Nov. 15, 2010 ANNUAL REPORT View Document
SC 13G/A Nov. 10, 2010 - View Document
SC 13D/A Sept. 28, 2010 SC 13D/A View Document
4 Sept. 9, 2010 PRIMARY DOCUMENT View Document
4 Sept. 9, 2010 PRIMARY DOCUMENT View Document
4 Sept. 8, 2010 PRIMARY DOCUMENT View Document
SC 13D/A Sept. 8, 2010 SC 13D/A View Document
4 Sept. 8, 2010 PRIMARY DOCUMENT View Document
4 Sept. 8, 2010 PRIMARY DOCUMENT View Document
SC 13D/A Sept. 8, 2010 SC 13D/A View Document
4 Sept. 8, 2010 PRIMARY DOCUMENT View Document
4 Sept. 7, 2010 PRIMARY DOCUMENT View Document
4 Aug. 20, 2010 PRIMARY DOCUMENT View Document
4 Aug. 17, 2010 PRIMARY DOCUMENT View Document
8-K Aug. 12, 2010 CURRENT REPORT View Document
4 Aug. 12, 2010 PRIMARY DOCUMENT View Document
4 Aug. 10, 2010 MAIN DOCUMENT DESCRIPTION View Document
4 Aug. 10, 2010 MAIN DOCUMENT DESCRIPTION View Document
4 Aug. 10, 2010 MAIN DOCUMENT DESCRIPTION View Document
4 Aug. 10, 2010 MAIN DOCUMENT DESCRIPTION View Document
S-8 Aug. 6, 2010 INITIAL REGISTRATION STATEMENT FOR SECURITIES TO BE OFFERED TO EMPLOYEES View Document
S-8 Aug. 6, 2010 INITIAL REGISTRATION STATEMENT FOR SECURITIES TO BE OFFERED TO EMPLOYEES View Document
10-Q Aug. 5, 2010 QUARTERLY REPORT View Document
8-K July 19, 2010 CURRENT REPORT View Document
8-K July 9, 2010 CURRENT REPORT View Document
10-Q May 11, 2010 QUARTERLY REPORT View Document
8-K April 12, 2010 CURRENT REPORT View Document
8-K March 17, 2010 CURRENT REPORT View Document
3 March 16, 2010 PRIMARY DOCUMENT View Document
SC 13G/A Feb. 12, 2010 - View Document
SC 13G Feb. 12, 2010 - View Document
10-Q Feb. 9, 2010 QUARTERLY REPORT View Document
ARS Feb. 3, 2010 AUTO-GENERATED PAPER DOCUMENT View Document
DEF 14A Jan. 29, 2010 DEFINITIVE PROXY STATEMENT View Document
SC 13G Jan. 25, 2010 SCHEDULE 13G View Document
4 Jan. 14, 2010 PRIMARY DOCUMENT View Document
4 Jan. 8, 2010 PRIMARY DOCUMENT View Document
4/A Jan. 6, 2010 PRIMARY DOCUMENT View Document
4 Jan. 6, 2010 PRIMARY DOCUMENT View Document
8-K Dec. 24, 2009 CURRENT REPORT View Document
4 Dec. 23, 2009 PRIMARY DOCUMENT View Document
3 Dec. 23, 2009 PRIMARY DOCUMENT View Document
8-K Nov. 25, 2009 CURRENT REPORT View Document
10-K Nov. 24, 2009 ANNUAL REPORT View Document
4 Nov. 24, 2009 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES View Document
4 Nov. 24, 2009 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES View Document
4 Nov. 24, 2009 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES View Document
4 Nov. 24, 2009 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES View Document
4 Nov. 24, 2009 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES View Document
4 Nov. 24, 2009 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES View Document
4 Nov. 24, 2009 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES View Document
4 Nov. 24, 2009 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES View Document
4/A Sept. 17, 2009 AMENDMENTS - STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES 16 View Document
4 Sept. 16, 2009 - View Document
UPLOAD Aug. 7, 2009 - View Document
10-Q Aug. 6, 2009 QUARTERLY REPORT View Document
CORRESP July 31, 2009 - View Document
8-K/A July 30, 2009 CURRENT REPORT View Document
UPLOAD July 2, 2009 - View Document
CORRESP July 1, 2009 - View Document
8-K June 30, 2009 CURRENT REPORT View Document
3 June 26, 2009 PRIMARY DOCUMENT View Document
4 June 26, 2009 PRIMARY DOCUMENT View Document
UPLOAD June 17, 2009 - View Document
8-K/A June 15, 2009 AMENDMENTS - CURRENT REPORT View Document
10-K/A June 5, 2009 AMENDMENT TO ANNUAL REPORT View Document
CORRESP May 18, 2009 - View Document
10-Q May 11, 2009 QUARTERLY REPORT View Document
8-K April 13, 2009 CURRENT REPORT View Document
UPLOAD March 31, 2009 - View Document
4 March 17, 2009 PRIMARY DOCUMENT View Document
4 March 16, 2009 PRIMARY DOCUMENT View Document
4 March 16, 2009 PRIMARY DOCUMENT View Document
4 March 16, 2009 PRIMARY DOCUMENT View Document
SC 13D/A Feb. 20, 2009 SC 13D/A View Document
SC 13G/A Feb. 13, 2009 - View Document
SC 13G/A Feb. 13, 2009 AMTECH SYSTEMS, INC. View Document
SC 13G Feb. 13, 2009 - View Document
SC 13G Feb. 13, 2009 SCHEDULE 13G View Document
ARS Feb. 12, 2009 AUTO-GENERATED PAPER DOCUMENT View Document
10-Q Feb. 9, 2009 QUARTERLY REPORT View Document
SC 13G Feb. 5, 2009 - View Document
DEF 14A Jan. 29, 2009 DEFINITIVE PROXY STATEMENT View Document
8-K Jan. 5, 2009 CURRENT REPORT View Document
8-K Dec. 15, 2008 CURRENT REPORT View Document
8-K Dec. 12, 2008 CURRENT REPORT View Document
4 Dec. 11, 2008 PRIMARY DOCUMENT View Document
4 Dec. 11, 2008 PRIMARY DOCUMENT View Document
4 Dec. 11, 2008 PRIMARY DOCUMENT View Document
10-K Dec. 10, 2008 ANNUAL REPORT View Document
SC 13D/A Sept. 30, 2008 AMTECH SYSTEMS, INC. - FORM SC 13D/A RICHARD L. SCOTT View Document
10-Q Aug. 13, 2008 QUARTERLY REPORT View Document
SC 13D July 28, 2008 AMTECH SYSTEMS, INC. - FORM SC 13D RICHARD L. SCOTT View Document
4 July 21, 2008 PRIMARY DOCUMENT View Document
4 May 28, 2008 PRIMARY DOCUMENT View Document
4 May 15, 2008 PRIMARY DOCUMENT View Document
10-Q May 14, 2008 QUARTERLY REPORT View Document
4 March 26, 2008 MAIN DOCUMENT DESCRIPTION View Document
4 March 26, 2008 MAIN DOCUMENT DESCRIPTION View Document
4 March 26, 2008 MAIN DOCUMENT DESCRIPTION View Document
4 March 20, 2008 PRIMARY DOCUMENT View Document
8-K March 11, 2008 8-K View Document
4 Feb. 22, 2008 PRIMARY DOCUMENT View Document
4 Feb. 19, 2008 PRIMARY DOCUMENT View Document
SC 13G Feb. 15, 2008 - View Document
SC 13G/A Feb. 14, 2008 ROTH & STARK SC13GA 12-31-2007 View Document
SC 13G/A Feb. 14, 2008 SEC FILING View Document
SC 13G/A Feb. 14, 2008 SEC FILING View Document
SC 13G/A Feb. 13, 2008 - View Document
10-Q Feb. 13, 2008 QUARTERLY REPORT View Document
SC 13G Jan. 31, 2008 SCHEDULE 13G View Document
DEF 14A Jan. 28, 2008 DEFINITIVE PROXY STATEMENT View Document
SC 13G/A Jan. 18, 2008 AMTECH SYSTEMS, INC. View Document
3 Jan. 18, 2008 - View Document
8-K Jan. 8, 2008 CURRENT REPORT View Document
4 Dec. 27, 2007 PRIMARY DOCUMENT View Document
4 Dec. 21, 2007 PRIMARY DOCUMENT View Document
4 Dec. 20, 2007 PRIMARY DOCUMENT View Document
10-K Dec. 12, 2007 ANNUAL REPORT View Document
8-K Dec. 12, 2007 CURRENT REPORT View Document
4 Dec. 10, 2007 - View Document
4 Dec. 10, 2007 - View Document
4 Dec. 10, 2007 - View Document
SC 13G Nov. 26, 2007 AMTECH SYSTEMS, INC. View Document
4 Nov. 20, 2007 PRIMARY DOCUMENT View Document
424B1 Nov. 16, 2007 PROSPECTUS FILED PURSUANT TO RULE 424(B)(1) View Document
EFFECT Nov. 15, 2007 - View Document
S-1MEF Nov. 15, 2007 NEW REGISTRATION STATEMENT FILED UNDER RULE 462(B) View Document
S-1/A Nov. 13, 2007 PRE-EFFECTIVE AMENDMENT TO GENERAL FORM OF REGISTRATION STATEMENT View Document
S-1/A Nov. 7, 2007 PRE-EFFECTIVE AMENDMENT TO GENERAL FORM OF REGISTRATION STATEMENT View Document
4 Nov. 2, 2007 PRIMARY DOCUMENT View Document
8-K/A Nov. 2, 2007 CURRENT REPORT View Document
4/A Oct. 31, 2007 - View Document
4 Oct. 25, 2007 PRIMARY DOCUMENT View Document
S-1 Oct. 23, 2007 INITIAL STATEMENT View Document
8-K Oct. 11, 2007 CURRENT REPORT View Document
SC 13D/A Oct. 3, 2007 AMTECH SYSTEMS, INC. - FORM SC 13D/A RICHARD L. SCOTT View Document
4/A Sept. 25, 2007 PRIMARY DOCUMENT View Document
4 Sept. 24, 2007 PRIMARY DOCUMENT View Document
4 Aug. 27, 2007 PRIMARY DOCUMENT View Document
S-8 Aug. 15, 2007 INITIAL STATEMENT View Document
10-Q Aug. 14, 2007 QUARTERLY REPORT View Document
SC 13D/A July 17, 2007 AMTECH SYSTEMS, INC. - FORM SC 13D/A RICHARD L. SCOTT View Document
4 May 22, 2007 PRIMARY DOCUMENT View Document
10-Q May 15, 2007 FORM 10-Q View Document
4 April 30, 2007 MAIN DOCUMENT DESCRIPTION View Document
3/A April 30, 2007 MAIN DOCUMENT DESCRIPTION View Document
ARS April 25, 2007 AUTO-GENERATED PAPER DOCUMENT View Document
3 April 24, 2007 MAIN DOCUMENT DESCRIPTION View Document
DEF 14A April 24, 2007 NOTICE OF ANNUAL MEETING OF SHAREHOLDERS View Document
8-K April 19, 2007 FORM 8-K View Document
8-K April 13, 2007 FORM 8-K View Document
8-K March 21, 2007 FORM 8-K View Document
SC 13G March 9, 2007 - View Document
4 Feb. 26, 2007 MAIN DOCUMENT DESCRIPTION View Document
3 Feb. 26, 2007 MAIN DOCUMENT DESCRIPTION View Document
8-K Feb. 23, 2007 FORM 8-K View Document
4/A Feb. 22, 2007 MAIN DOCUMENT DESCRIPTION View Document
4 Feb. 21, 2007 MAIN DOCUMENT DESCRIPTION View Document
4 Feb. 21, 2007 PRIMARY DOCUMENT View Document
3 Feb. 21, 2007 MAIN DOCUMENT DESCRIPTION View Document
SC 13D/A Feb. 16, 2007 AMTECH SYSTEMS, INC. View Document
SC 13G Feb. 14, 2007 SEC FILING View Document
10-Q Feb. 14, 2007 FORM 10-Q View Document
SC 13G Feb. 14, 2007 SEC FILING View Document
4 Feb. 12, 2007 FORM 4 SUBMISSION View Document
SC 13D/A Feb. 12, 2007 - View Document
SC 13G Feb. 9, 2007 - View Document
3 Feb. 6, 2007 PRIMARY DOCUMENT View Document
424B1 Feb. 1, 2007 PROSPECTUSES FILED PURSUANT TO RULE 424(B)(1) View Document
S-1MEF Feb. 1, 2007 FORM S-1MEF View Document
EFFECT Jan. 31, 2007 - View Document
S-1/A Jan. 30, 2007 PRE-EFFECTIVE AMENDMENT View Document
10-K/A Jan. 29, 2007 FORM 10-K/A View Document
S-1/A Jan. 16, 2007 PRE-EFFECTIVE AMENDMENT View Document
SC 13D/A Dec. 27, 2006 - View Document
S-1 Dec. 22, 2006 FORM S-1 View Document
10-K Dec. 21, 2006 FORM 10-K View Document
8-K Dec. 14, 2006 FORM 8-K View Document
4/A Dec. 13, 2006 PRIMARY DOCUMENT View Document
4 Dec. 12, 2006 - View Document
4 Dec. 12, 2006 - View Document
3 Nov. 27, 2006 FORM 3 SUBMISSION View Document
SC 13D/A Nov. 27, 2006 AMTECH SYSTEMS, INC. - FORM SC 13D/A RICHARD L. SCOTT View Document
SC 13G/A Nov. 6, 2006 AMTECHSYSTEMSINC13GAMD1 View Document
10-Q Aug. 14, 2006 FORM 10-Q View Document
SC 13D/A June 27, 2006 AMTECH SYSTEMS, INC./RICHARD L. SCOTT View Document
SC 13G June 5, 2006 AMTECHSYSTEMSINC13G View Document
SC 13D/A May 16, 2006 - View Document
SC 13D/A May 16, 2006 - View Document
10-Q May 15, 2006 FORM 10-Q View Document
SC 13D/A May 15, 2006 AMTECH SYSTEMS, INC. - FORM SC 13D/A View Document
3 May 3, 2006 PRIMARY DOCUMENT View Document
4 May 3, 2006 PRIMARY DOCUMENT View Document
8-K April 28, 2006 FORM 8-K View Document
8-K April 12, 2006 FORM 8-K View Document
8-K March 23, 2006 FORM 8-K View Document
4 March 3, 2006 PRIMARY DOCUMENT View Document
4 March 3, 2006 PRIMARY DOCUMENT View Document
4 March 3, 2006 PRIMARY DOCUMENT View Document
4 Feb. 22, 2006 PRIMARY DOCUMENT View Document
4 Feb. 21, 2006 - View Document
4 Feb. 21, 2006 - View Document
4 Feb. 15, 2006 PRIMARY DOCUMENT View Document
10-Q Feb. 14, 2006 FORM 10-Q View Document
DEF 14A Feb. 13, 2006 - View Document
ARS Feb. 10, 2006 AUTO-GENERATED PAPER DOCUMENT View Document
424B3 Feb. 3, 2006 FORM 424B3 View Document
10-K/A Jan. 30, 2006 - View Document
4/A Jan. 30, 2006 - View Document
3/A Jan. 30, 2006 - View Document
S-8 Jan. 17, 2006 FORM S-8 View Document
S-3 Jan. 13, 2006 FORM S-3 View Document
S-8 POS Jan. 13, 2006 FORM S-8/A View Document
10-K Dec. 29, 2005 FORM 10-K View Document
4 Nov. 16, 2005 PRIMARY DOCUMENT View Document
4 Nov. 16, 2005 PRIMARY DOCUMENT View Document
4 Nov. 16, 2005 PRIMARY DOCUMENT View Document
3 Nov. 14, 2005 FORM 3 View Document
3 Nov. 7, 2005 PRIMARY DOCUMENT View Document
8-K Nov. 2, 2005 FORM 8-K View Document
UPLOAD Nov. 1, 2005 - View Document
UPLOAD Nov. 1, 2005 - View Document
10-K/A Oct. 18, 2005 FORM 10-K AMENDMENT NO. 2 View Document
10-Q/A Oct. 18, 2005 FORM 10-Q AMENDMENT NO 1 View Document
CORRESP Oct. 12, 2005 - View Document
10-Q Aug. 15, 2005 FORM 10-Q View Document
CORRESP July 22, 2005 - View Document
DEF 14A June 15, 2005 DEFINITIVE PROXY STATEMENT View Document
ARS June 14, 2005 AUTO-GENERATED PAPER DOCUMENT View Document
SC 13D June 1, 2005 - View Document
8-K May 24, 2005 FORM 8-K View Document
10-Q May 16, 2005 FORM 10-Q View Document
REGDEX May 9, 2005 AUTO-GENERATED PAPER DOCUMENT View Document
SC 13D May 9, 2005 - View Document
SC 13D May 2, 2005 AMTECH SYSTEMS, INC. View Document
8-K April 28, 2005 FORM 8K View Document
10-Q Feb. 15, 2005 10-Q View Document
NT 10-Q Feb. 15, 2005 NT 10-Q View Document
10-K/A Jan. 28, 2005 10-K/A View Document
10-K Jan. 13, 2005 10-K View Document
NT 10-K/A Jan. 3, 2005 NT 10-K/A View Document
NT 10-K Dec. 30, 2004 NT 10-K View Document
8-K/A Sept. 29, 2004 AMENDMENT NO. 1 TO FORM 8-K View Document
10-Q Aug. 11, 2004 FORM 10-Q View Document
8-K July 15, 2004 FORM 8-K View Document
8-K July 7, 2004 FORM 8-K View Document
10-Q May 14, 2004 FORM 10-Q View Document
8-K May 5, 2004 FORM 8-K View Document
4 May 5, 2004 PRIMARY DOCUMENT View Document
4 May 5, 2004 PRIMARY DOCUMENT View Document
4 April 28, 2004 PRIMARY DOCUMENT View Document
10-Q Feb. 17, 2004 FORM 10-Q View Document
ARS Feb. 17, 2004 AUTO-GENERATED PAPER DOCUMENT View Document
DEF 14A Jan. 28, 2004 DEFINITIVE NOTICE AND PROXY STATEMENT View Document
10-K Dec. 23, 2003 FORM 10-K View Document
10-Q Aug. 20, 2003 10-Q View Document
NT 10-Q Aug. 15, 2003 NT 10-Q View Document
10-Q May 15, 2003 QUARTERLY REPORT FOR THE QTR ENDED 3/31/2003 View Document
10-Q Feb. 14, 2003 QUARTERLY REPORT FOR QTR ENDING 12-31-02 View Document
S-8 Feb. 11, 2003 REGISTRATION STATEMENT OF AMTECH SYSTEMS, INC. View Document
10-K/A Feb. 11, 2003 AMENDMENT NO. 1 TO FORM 10-K View Document
ARS Jan. 28, 2003 AUTO-GENERATED PAPER DOCUMENT View Document
DEF 14A Jan. 27, 2003 DEFINITIVE N&PS View Document
NT 10-K Dec. 31, 2002 NOTIFICATION OF LATE FILING View Document
10-K Dec. 31, 2002 ANNUAL REPORT FOR THE FISCAL YR ENDED 09/30/2002 View Document
10-Q Aug. 8, 2002 QUARTERLY REPORT FOR QTR ENDING 6-30-02 View Document
8-K July 11, 2002 CURRENT REPORT DTD. 07/11/2002 View Document
10-Q May 10, 2002 QUARTERLY REPORT FOR QTR. ENDED 03/31/2002 View Document
10-K405/A Feb. 15, 2002 AMENDMENT NO. 1 TO 10-K405 View Document
10-Q Feb. 14, 2002 QUARTERLY REPORT FOR THE QTR ENDED 12/31/01 View Document
DEF 14A Jan. 28, 2002 DEFINITIVE N&PS OF AMTECH SYSTEMS View Document
S-8 Jan. 15, 2002 FORM S-8 OF AMTECH SYSTEMS View Document
10-K405 Jan. 14, 2002 ANNUAL REPORT FOR YEAR ENDING 09-30-2001 View Document
NT 10-K Jan. 2, 2002 NT 10-K View Document
10-Q Aug. 14, 2001 QUARTERLY REPORT FOR QTR ENDING 6-30-01 View Document
10-Q May 15, 2001 QUARTERLY REPORT FOR QTR. ENDED 03/31/2001 View Document
DEF 14A Feb. 20, 2001 DEF 14A View Document
10-Q Feb. 14, 2001 QUARTERLY REPORT FOR THE QTR ENDED 12/31/2000 View Document
SC 13G Feb. 13, 2001 - View Document
10-K/A Jan. 30, 2001 AMENDMENT NO. 1 TO FORM 10-K View Document
10-K405 Dec. 22, 2000 AMTECH SYSTEMS, INC. View Document
424B3 Oct. 31, 2000 FINAL PROSPECTUS OF AMTECH SYSTEMS, INC. View Document
S-3 Oct. 2, 2000 FORM S-3 OF AMTECH SYSTEMS, INC. View Document
8-K Sept. 22, 2000 CURRENT REPORT DATED 09/08/2000 View Document
S-8 Sept. 19, 2000 FORM S-8 OF AMTECH SYSTEMS, INC. View Document
10-Q Aug. 14, 2000 QUARTERLY REPORT FOR THE QTR ENDED 6/30/00 View Document
4 June 8, 2000 FORM 4 OF ALVIN L. KATZ View Document
10-Q May 15, 2000 FORM 10-Q View Document
10-K/A March 3, 2000 AMENDMENT NO. 1 TO FORM 10-K View Document
10-Q Feb. 15, 2000 QUARTERLY REPORT FOR THE QTR. ENDED 12/31/99 View Document
NT 10-Q Feb. 15, 2000 NOTIFICATION OF LATE FILING View Document
DEF 14A Feb. 10, 2000 DEFINITIVE N&PS OF AMTECH SYSTEMS, INC. View Document
10-K405 Dec. 23, 1999 ANNUAL REPORT FOR THE YEAR ENDED 9/30/99 View Document
10-Q Aug. 16, 1999 QTRLY REPORT FOR THE PERIOD ENDED 06/30/99 View Document
8-A12G June 8, 1999 FORM 8-A FOR AMTECH SYSTEMS, INC. View Document
8-K June 1, 1999 CURRENT REPORT DATED 5/17/99 View Document
10-Q May 17, 1999 QUARTERLY REPORT View Document
10-Q Feb. 16, 1999 QUARTERLY REPORT FOR THE QTR ENDED 12/31/98 View Document
DEF 14A Jan. 28, 1999 DEFINITIVE N&PS OF AMTECH SYSTEMS, INC. View Document
PRE 14A Jan. 15, 1999 PRRELIMINARY N&PS OF AMTECH SYSTEMS, INC. View Document
10-K405 Dec. 24, 1998 FORM 10-K OF AMTECH SYSTEMS, INC. FTYE 9/30/98 View Document
10-Q Aug. 14, 1998 QUARTERLY REPORT F.T.Q.E. 6/30/98 View Document
10-Q May 14, 1998 QUARTERLY REPORT FOR 2ND QTR View Document
10-Q/A Feb. 19, 1998 QUARTERLY REPORT - AMENDMENT View Document
10-Q Feb. 17, 1998 QUARTERLY REPORT View Document
10-K/A Feb. 4, 1998 FORM 10-K AMENDMENT View Document
DEF 14A Jan. 29, 1998 NOTICE & PROXY View Document
PRE 14A Jan. 12, 1998 NOTICE & PROXY View Document
10-K405 Dec. 29, 1997 ANNUAL REPORT View Document
5 Nov. 14, 1997 FORM 5 View Document
SC 13G Sept. 12, 1997 SCHEDULE 13G View Document
8-K/A Sept. 9, 1997 AMENDMENT TO 8-K View Document
10-Q Aug. 19, 1997 QUARTERLY REPORT View Document
NT 10-Q Aug. 14, 1997 NOTIFICATION OF LATE FILING View Document
8-K July 9, 1997 FORM 8-K View Document
10-Q May 15, 1997 FORM 10-Q View Document
10-Q Feb. 14, 1997 FORM 10-Q View Document
DEF 14A Jan. 30, 1997 NOTICE OF SPECIAL MEETING View Document
10-K405 Dec. 30, 1996 ANNUAL REPORT View Document
S-3 Aug. 14, 1996 FORM S-3 View Document
10-Q Aug. 14, 1996 FORM 10Q View Document
S-8 Aug. 9, 1996 NON-EMPLOYEE DIRECTORS STOCK OPTION PLAN View Document
S-8 Aug. 9, 1996 1995 STOCK OPTION AND STOCK BONUS PLANS View Document
S-3 Aug. 9, 1996 FORM S-3 View Document
10-Q May 21, 1996 FORM 10-Q View Document
NT 10-Q May 15, 1996 FORM NT 10-Q View Document
10-Q Feb. 14, 1996 FORM 10-Q View Document
8-K Feb. 9, 1996 FORM 8-K View Document
DEF 14A Jan. 29, 1996 PROXY STATEMENT View Document
10-K Jan. 16, 1996 FORM 10-K View Document
NT 10-K Dec. 29, 1995 FORM 12B-25 View Document
10-Q Aug. 14, 1995 FORM 10-Q View Document
10-Q May 15, 1995 FORM 10-Q View Document